Fabrication of Nanoshell-Based 3D Periodic Structures by Templating Process using Solution-derived ZnO

被引:17
作者
Araki, Shinji [1 ]
Ishikawa, Yasuaki [1 ]
Wang, Xudongfang [1 ]
Uenuma, Mutsunori [1 ]
Cho, Donghwi [2 ]
Jeon, Seokwoo [2 ]
Uraoka, Yukiharu [1 ]
机构
[1] Nara Inst Sci & Technol, Grad Sch Mat Sci, 8916-5 Takayama, Nara 6300192, Japan
[2] Korea Adv Inst Sci & Technol, Dept Mat Sci & Engn, Daejeon 305701, South Korea
来源
NANOSCALE RESEARCH LETTERS | 2017年 / 12卷
关键词
Solution-derived ZnO; Three-dimensional (3D); Nanoshell-based structure; Hierarchical architecture; Proximity field nanopatterning; Templating process; 3-DIMENSIONAL PHOTONIC CRYSTALS; PRISM HOLOGRAPHIC LITHOGRAPHY; NANO-ACCORDION STRUCTURES; THERMOELECTRIC PROPERTIES; NANOSTRUCTURES; TITANIA; ARRAYS; EXPOSURE; 2-PHOTON;
D O I
10.1186/s11671-017-2186-6
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Fabrication methods for a 3D periodic nanostructure with excellent and unique properties for various applications, such as photonic and phononic crystals, have attracted considerable interest. Templating processes using colloidal crystals have been proposed to create nanoshell-based 3D structures over a large area with ease. However, there are technical limitations in structural design, resulting in difficulties for structural flexibility. Here, we demonstrate a combination of proximity field nanopatterning and infiltration processes using solution-derived ZnO for a nanoshell-based 3D periodic structure with high structural flexibility and controllability. A unique process of infiltration of a solution-derived material into a polymeric template prepared by a proximity field nanopatterning process achieves the fabrication of a pre-formed layer that works as a protective layer for the template and framework for the inverse structure. Subsequently, this process shows the controllability of nanoshell thickness and significant improvement in the structure height shrinkage factor (16%) compared to those of a previous non-vacuum infiltration method (34%). The proposed method offers high controllability and flexibility in the design of structural sizes, leading to further development toward nanoshell-based 3D structures for various applications including energy devices and sensors.
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页数:9
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