Characterization of TiN thin films subjected to nanoindentation using focused ion beam milling

被引：19

作者：

Ma, LW ^{[1
]}

Cairney, JM ^{[1
]}

Hoffman, MJ ^{[1
]}

Munroe, PR ^{[1
]}

机构：

[1] Univ New S Wales, Sydney, NSW 2052, Australia

来源：

APPLIED SURFACE SCIENCE | 2004年 / 237卷 / 1-4期

关键词：

TiN; thin films; nanoindentation; FIB;

D O I：

10.1016/j.apsusc.2004.06.135

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The microstructure and surface morphology of a TiN hard, wear resistant coating on a V820 nitridable alloy ductile steel substrate following nanoindentation have been characterized using focused ion beam (FIB) milling. A TiN coating, similar to0.6 mum in thickness, was deposited on a ductile steel substrate using a cathodic arc evaporation (CAE) technique. Pop-in events were observed in the load-displacement curves and correlated to the observed microstructural features. Following nanoindentation with a 1 mum radius spherical indenter at loads of 100 mN and 500 mN, circumferential cracks were observed inside the indentation. Observations of nanoindented cross-sections prepared using FIB revealed both columnar cracks in the coating and shear steps at the coating-substrate interface. These structural features were observed at higher resolution using a transmission electron microscope (TEM). (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：631 / 635

页数：5

共 12 条

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