Rigorous extraction tunability of Si-integrated Ba0.3Sr0.7TiO3 thin film up to 60 GHz

被引：18

作者：

Ponchel, Freddy ^{[1
]}

Legier, Jean-Fancois ^{[2
]}

Soyer, Caroline ^{[2
]}

Remiens, Denis ^{[2
]}

Midy, Jean ^{[1
]}

Lasri, Tuami ^{[2
]}

Gueguan, Guillaume ^{[1
]}

机构：

[1] ST Microelect, SAS 16, F-37071 Tours, France

[2] Univ Sci & Technol Lille, CNRS, UMR 8520, IEMN, F-59652 Villeneuve Dascq, France

来源：

APPLIED PHYSICS LETTERS | 2010年 / 96卷 / 25期

关键词：

barium compounds; coplanar waveguides; dielectric losses; ferroelectric thin films; finite element analysis; permittivity; sputter deposition; strontium compounds;

D O I：

10.1063/1.3454772

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

400-nm-thick Ba0.3Sr0.7TiO3 thin films are deposited on high resistivity silicon by in situ radio frequency magnetron sputtering. Coplanar waveguides with 1 mu m slot width are designed, with accurate knowledge frequency losses behavior, to determine ferroelectric thin-films properties up to 60 GHz. Permittivity, loss tangent, and tunability are extracted through measurements and home made finite element analysis. Tunability of 33% and 29%, with 30 V maximum applied voltage (electric field of 300 kV/cm), are measured at 5 GHz and 60 GHz, respectively, while the dielectric losses evolve from 0.5% to 5%. A brief highlight is proposed about tunable silicon integrated quarter wavelength transformer potentialities for impedance matching. (C) 2010 American Institute of Physics. [doi:10.1063/1.3454772]

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页数：3

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