A fully integrated optical detector with a-Si:H based color photodiodes

被引：1
作者：
Watty, Krystian [1 ]
Merfort, Christian [1 ]
Seibel, Konstantin [1 ]
Schoeler, Lars [1 ]
Boehm, Markus [1 ]
机构：
[1] Univ Siegen, IMT, D-57076 Siegen, Germany
来源：
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2010年 / 207卷 / 03期
关键词：
LIGHT-EMITTING DIODE; AMORPHOUS-SILICON; ANALYSIS SYSTEMS; SENSORS;
D O I：
10.1002/pssa.200982722
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The fabrication of an electrophoresis separation microchip with monolithic integrated excitation light source and variospectral photodiodes for absorption detection is presented in this paper. Microchip based separation techniques are essential elements in the development of fully integrated micro-total analysis systems (mu-TAS). An integrated microfluidic device, like an application specific lab-on-microchip (ALM) (Seibel et al., in: MRS Spring Meeting, San Francisco, USA, 2005 [1]), includes all components, necessary to perform a chemical analysis on chip and it can be used as a stand-alone unit directly at the point of sampling. Variospectral diodes based on hydrogenated amorphous silicon (a-Si:H) technology allow for advanced optical detection schemes, because the spectral sensitivity of the devices can be tailored to fit the emission of specific fluorescent markers. Important features of a-Si:H variospectral photodiodes are a high dynamic range, a bias-tunable spectral sensitivity and a very good linearity for the separation of mixed color signals. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码：700 / 703
页数：4
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