Modeling and simulation of the plasma absorption probe

被引:45
作者
Lapke, M. [1 ]
Mussenbrock, T.
Brinkmann, R. P.
Scharwitz, C.
Boeke, M.
Winter, J.
机构
[1] Ruhr Univ Bochum, Ctr Plasma Sci & Technol, Inst Theoret Elect Engn, D-44780 Bochum, Germany
[2] Ruhr Univ Bochum, Ctr Plasma Sci & Technol, Inst Expt Phys 2, D-44780 Bochum, Germany
关键词
D O I
10.1063/1.2714202
中图分类号
O59 [应用物理学];
学科分类号
摘要
The plasma absorption probe (PAP) was invented as an economical and robust diagnostic device to determine the electron density distribution in technical plasmas. It consists of a small antenna enclosed by a dielectric tube which is immersed in the plasma. A network analyzer feeds a rf signal to the antenna and displays the frequency dependence of the power absorption. From the absorption spectrum the value of the electron density is calculated. The original evaluation formula was based on the dispersion relation of plasma surface waves propagating along an infinite dielectric cylinder. In this letter the authors present the analysis of a less idealized configuration. The calculated spectra are in good qualitative agreement with their experimental counterparts, but differ considerably from those predicted by the surface wave ansatz. An evaluation scheme which takes our findings into account will improve the performance of the PAP technique further. (c) 2007 American Institute of Physics.
引用
收藏
页数:3
相关论文
共 17 条
[1]   IDENTIFICATION OF PLASMA-SHEATH RESONANCES IN A PARALLEL-PLATE PLASMA REACTOR [J].
ANNARATONE, BM ;
KU, VPT ;
ALLEN, JE .
JOURNAL OF APPLIED PHYSICS, 1995, 77 (10) :5455-5457
[2]   Self-excitation of the plasma series resonance in radio-frequency discharges: An analytical description [J].
Czarnetzki, U. ;
Mussenbrock, T. ;
Brinkmann, R. P. .
PHYSICS OF PLASMAS, 2006, 13 (12)
[3]   A novel technique for plasma density measurement using surface-wave transmission spectra [J].
Dine, S ;
Booth, JP ;
Curley, GA ;
Corr, CS ;
Jolly, J ;
Guillon, J .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2005, 14 (04) :777-786
[4]   Electron heating in capacitively coupled discharges and reactive gases [J].
Franz, G ;
Klick, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2005, 23 (04) :917-921
[5]  
HUTCHINSON IH, 2002, PRINCIPLES PLASMA DI
[6]   Nonlinearity of the radio-frequency sheath [J].
Klick, M .
JOURNAL OF APPLIED PHYSICS, 1996, 79 (07) :3445-3452
[7]   Plasma absorption probe for measuring electron density in an environment soiled with processing plasmas [J].
Kokura, H ;
Nakamura, K ;
Ghanashev, IP ;
Sugai, H .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9A) :5262-5266
[8]  
Ku VPT, 1998, J APPL PHYS, V84, P6546, DOI 10.1063/1.369026
[9]  
Meyer-Vernet N., 1984, European Journal of Physics, V5, P150, DOI 10.1088/0143-0807/5/3/005
[10]  
MURAOKA K, 2001, LASER AIDED DIAGNOST