Inkjet-Printed Graphene-based Flexible Humidity Sensor for Environmental Applications

被引:0
|
作者
Sulaiman, Suraya [1 ]
Rashid, Nora'zah Abdul [1 ]
Aziz, Aiman Sajidah Abdul [1 ]
Jun, Liew Qiao [1 ]
Jaafar, Syed Muhammad Hafiz Syed Mohd [1 ]
机构
[1] MIMOS Berhad, Nanoelect Lab, Kuala Lumpur, Malaysia
来源
2020 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS (ICSE 2020) | 2020年
关键词
flexible; printed; multilayer; graphene; humidity;
D O I
10.1109/icse49846.2020.9166876
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this study, a fully flexible inkjet-printed graphene-based capacitive humidity sensor is investigated using graphene oxide (GO) as sensing material mixed with Polyacrylic Acid, PAA. The printed humidity sensor consists of i) an optimally designed interdigitated electrode (IDE) made from reduced graphene oxide conductive ink material decorated with silver nanoparticle (rGO/Ag), ii) inkjet-printed GO as sensing material and iii) polyethylene terephthalate, PET as flexible substrate. The conductive ink is synthesize in house with a stable and consistent temperature setting which has successfully improve the yield peribrmance of the graphene-based inkjet and the method of preparation has prevent the ink from agglomeration during printing. The multilayer inkjet-printed GO on top of the rGO/Ag IDE is employ to increase the contact area between the sensing layer and water vapor, thus leading to a high sensitivity sensor. The results shows that as the relative humidity is varies in the range of 30%RH to 90%RH, the proposed humidity sensor is able to achieve a highest sensitivity of 0.15pF/%RH at 50 degrees C. The sensor show a stable capacitance value with a linear output at low humidity and increase exponentially at above 60%RH. The developed sensor also show a good temperature dependence at temperature below 60 degrees C and humidity lower than 70%RH.
引用
收藏
页码:148 / 151
页数:4
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