Fabrication of Advanced Functional Devices Combining Soft Chemistry with X-ray Lithography in One Step

被引：61

作者：

Falcaro, Paolo ^{[1
,2
]}

Malfatti, Luca ^{[1
]}

Vaccari, Lisa ^{[3
]}

Amenitsch, Heinz ^{[4
]}

Marmiroli, Benedetta ^{[4
]}

Grenci, Gianluca ^{[5
]}

Innocenzi, Plinio ^{[1
]}

机构：

[1] Univ Sassari, Lab Sci Mat & Nanotecnol LMNT, CR INSTM, I-07041 Alghero Ss, Italy

[2] CSIRO, Div Engn & Mat Sci, Clayton, Vic 3169, Australia

[3] Sincrotrone Trieste SCPA, I-34012 Basovizza Ts, Italy

[4] Austrian Acad Sci, Inst Biophys & Nanosyst Res, A-8042 Graz, Austria

[5] TASC, INFM Natl Lab, I-34012 Trieste, Italy

来源：

ADVANCED MATERIALS | 2009年 / 21卷 / 48期

关键词：

RESOLUTION; TECHNOLOGIES; MICROSCOPY;

D O I：

10.1002/adma.200901561

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Deep X-ray lithography combined with sol-gel techniques offers facile fabrication of controlled patterned films, Using sol-gel, different functional properties can be induced; deep X-ray lithography alters the functionality in the exposed regions. Miniaturized devices based on local property changes are easily fabricated: this technique requires no resist, enabling direct patterning of films in a one-step lithographic process.

引用

收藏

页码：4932 / +

页数：6

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