PZT length optimization of MEMS piezoelectric energy harvester with a non-traditional cross section: simulation study

被引：37

作者：

Sunithamani, S. ^{[1
]}

Lakshmi, P. ^{[1
]}

Flora, E. Eba ^{[1
]}

机构：

[1] Anna Univ, Dept Elect & Elect Engn, Coll Engn, Chennai 600025, Tamil Nadu, India

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2014年 / 20卷 / 12期

关键词：

Energy Harvester; Open Circuit Voltage; Rectangular Cross Section; Piezoelectric Layer; Piezoelectric Energy Harvester;

D O I：

10.1007/s00542-013-1920-y

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Cantilevered beams with piezoelectric layers have been used as a MEMS piezoelectric energy harvester for the one decade. The literature includes several structures such as rectangular triangular and trapezoidal geometry. In several literatures the length of cantilever is optimized to enhance the performance. This paper presents enhancing the performance of energy harvester by optimizing the PZT length through simulation using moving mesh analysis in COMSOL Multiphysics. The results show that the MEMS piezoelectric energy harvester with optimized PZT length produces more voltage. Simulation results are compared with other structures having traditional and non-traditional cross section.

引用

页码：2165 / 2171

页数：7

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