Electrical properties of atomically controlled Si:P nanowires created by scanning probe microscopy

被引:0
作者
Ruess, F. J. [1 ]
Goh, K. E. J. [1 ]
Weber, Bent [1 ]
Hamilton, A. R. [1 ]
Simmons, M. Y. [1 ]
机构
[1] Australian Res Council Ctr Excellence Quantum Com, Sydney, NSW 2052, Australia
来源
PHYSICS OF SEMICONDUCTORS, PTS A AND B | 2007年 / 893卷
基金
澳大利亚研究理事会;
关键词
silicon; scanning probe microscopy; nanoelectronics; transport measurements; dephasing mechanisms;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the electrical proper-ties of highly phosphorus-doped, planar nanowires with widths of 90, 50 and 27 mu. I-V measurements at 4 K show that all wires are highly ohmic with resistivities as low as I x 10(-8) Omega cm. Magnetotransport measurements are consistent with 2D weak localization theory and demonstrate an increasing contribution to conductance as the electron phase coherence length approaches the wire width.
引用
收藏
页码:687 / +
页数:2
相关论文
共 4 条
[1]  
HIKAMI S, 1980, PROG THEOR PHYS, V63, P707, DOI 10.1143/PTP.63.707
[2]   The use of etched registration markers to make four-terminal electrical contacts to STM-patterned nanostructures [J].
Ruess, FJ ;
Oberbeck, L ;
Goh, KEJ ;
Butcher, MJ ;
Gauja, E ;
Hamilton, AR ;
Simmons, MY .
NANOTECHNOLOGY, 2005, 16 (10) :2446-2449
[3]   Toward atomic-scale device fabrication in silicon using scanning probe microscopy [J].
Ruess, FJ ;
Oberbeck, L ;
Simmons, MY ;
Goh, KEJ ;
Hamilton, AR ;
Hallam, T ;
Schofield, SR ;
Curson, NJ ;
Clark, RG .
NANO LETTERS, 2004, 4 (10) :1969-1973
[4]   Nanoscale electronics based on two-dimensional dopant patterns in silicon [J].
Shen, TC ;
Kline, JS ;
Schenkel, T ;
Robinson, SJ ;
Ji, JY ;
Yang, C ;
Du, RR ;
Tucker, JR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (06) :3182-3185