Effects of Gate Electron Concentration on the Performance of Pentacene Organic Thin-Film Transistors
被引:16
作者:
Ma, Yuan Xiao
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机构:
Univ Hong Kong, Dept Elect & Elect Engn, Hong Kong, Hong Kong, Peoples R ChinaUniv Hong Kong, Dept Elect & Elect Engn, Hong Kong, Hong Kong, Peoples R China
Ma, Yuan Xiao
[1
]
Han, Chuan Yu
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机构:
Xi An Jiao Tong Univ, Sch Microelect, Xian 710049, Peoples R ChinaUniv Hong Kong, Dept Elect & Elect Engn, Hong Kong, Hong Kong, Peoples R China
Han, Chuan Yu
[2
]
Tang, Wing Man
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机构:
Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R ChinaUniv Hong Kong, Dept Elect & Elect Engn, Hong Kong, Hong Kong, Peoples R China
Tang, Wing Man
[3
]
Lai, Pui To
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机构:
Univ Hong Kong, Dept Elect & Elect Engn, Hong Kong, Hong Kong, Peoples R ChinaUniv Hong Kong, Dept Elect & Elect Engn, Hong Kong, Hong Kong, Peoples R China
Lai, Pui To
[1
]
机构:
[1] Univ Hong Kong, Dept Elect & Elect Engn, Hong Kong, Hong Kong, Peoples R China
[2] Xi An Jiao Tong Univ, Sch Microelect, Xian 710049, Peoples R China
[3] Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
Organic thin-film transistor;
NdTaON;
gate electron concentration;
phonon scattering;
RANGE COULOMB INTERACTIONS;
SMALL SI DEVICES;
MOBILITY;
SCATTERING;
LAYER;
D O I:
10.1109/LED.2018.2832220
中图分类号:
TM [电工技术];
TN [电子技术、通信技术];
学科分类号:
0808 ;
0809 ;
摘要:
Bottom-gated pentacene organic thin-film transistors (OTFTs) with NdTaON as high-k gate dielectric have been fabricated on substrates with different resistivities: 0.005 Omega.cm, 0.3 similar to 0.9 Omega.cm, and 1 similar to 5 Omega.cm for n-Si wafers, and 35 Omega/sq for ITO-coated glass. On the three n-Si substrates, the dielectric surface roughness and pentacene grain size are nearly the same, but the carrier mobility of the OTFTs show an obvious increase with decreasing resistivity, indicating that the gate electron concentration can affect the device performance. Despite the much larger dielectric surface roughness and smaller pentacene grain size, the OTFT on the ITO-coated glass shows the highest carrier mobility. These effects are attributed to remote phonon scattering on the channel carriers, which has been strongly screened by the electrons in the gate electrode. According to the measurement on the mobility degradation at high temperature, the remote phonon scattering is determined to be the dominant factor affecting the carrier mobility. As a result, the OTFT on ITO glass can achieve a high carrier mobility of 2.43 cm(2)/V.s and a small threshold voltage of -0.10 V.