The use of scanning electron microscopy, Auger electron spectroscopy, secondary ion mass spectrometry for investigation of structure and elemental composition of the electroinsulating coating

被引:0
作者
Goncharenko, YD [1 ]
Evseyev, LA [1 ]
机构
[1] Russian State Res Ctr, Atom Resources Res Inst, Dimitrovograd, Russia
来源
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA | 1998年 / 62卷 / 03期
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中图分类号
O4 [物理学];
学科分类号
0702 ;
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页码:496 / 501
页数:6
相关论文
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BENNINGHOVEN A, 1987, SECONDARY ION MASS S, P277
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Davis L.E., 1986, HDB AUGER ELECT SPEC
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