Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer

被引：39

作者：

Oreb, BF

Farrant, DI

Walsh, CJ

Forbes, G

Fairman, PS

机构：

[1] Telecommun & Ind Phys Commonwealth Sci & Ind Res, Lindfield, NSW, Australia

[2] Macquarie Univ, Dept Phys, N Ryde, NSW 2109, Australia

来源：

APPLIED OPTICS | 2000年 / 39卷 / 28期

关键词：

D O I：

10.1364/AO.39.005161

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A 300-mm-aperture digital phase-shifting Fizeau interferometer has been developed in-house for precision metrology of optical components fabricated by the optical workshop at Telecommunications and Industrial Physics, Commonwealth Scientific and Industrial Research Organization. We describe the procedures used in the calibration of the instrument. A reference data file representing the deviations from flatness of the reference surface is generated, measurement uncertainty estimated, and aberrations in the instrument assessed. Measurements on 250-mm-diameter uncoated optical surfaces have consistently shown short-term repeatability of 0.3-nm rms from measurement to measurement and allowed for absolute characterization of these surfaces to within a few nanometers. (C) 2000 Optical Society of America OCIS codes: 120.3180, 120.3940, 120.6650, 120.5050, 120.4570, 120.4800.

引用

页码：5161 / 5171

页数：11

共 50 条

[21] The Influence of Phase-shifting Algorithms on the Instrument Transfer Function in a Fizeau Interferometer [J].

Zhang, Xu ;

Lu, Qi ;

Xu, Tianzhu ;

Sun, Ying ;

Liu, Shijie ;

Silin, Dmitry ;

Kozhevatov, Ilya ;

Khazanov, Efim .

OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS IX, 2022, 12319

[22] Technical Problems in Large-aperture Phase-shifting Interferometer [J].

Wu, XuHua ;

Zhang, Chuang ;

Zhao, Jing ;

Chen, Lei .

2011 INTERNATIONAL CONFERENCE ON FUTURE COMPUTER SCIENCE AND APPLICATION (FCSA 2011), VOL 1, 2011, :49-52

[23] The Design and Characteristics of a 630-mm Phase-Shifting Interferometer [J].

Silin, D. E. ;

Kozhevatov, I. E. ;

Kulikova, E. H. ;

Pigasin, A. V. ;

Speransky, S. B. ;

Bel'kov, S. A. ;

Derkach, I. N. ;

Lobachev, D. I. ;

Chernov, I. E. .

INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 2018, 61 (03) :393-399

[24] The Design and Characteristics of a 630-mm Phase-Shifting Interferometer [J].

D. E. Silin ;

I. E. Kozhevatov ;

E. H. Kulikova ;

A. V. Pigasin ;

S. B. Speransky ;

S. A. Bel’kov ;

I. N. Derkach ;

D. I. Lobachev ;

I. E. Chernov .

Instruments and Experimental Techniques, 2018, 61 :393-399

[25] System error calibration for Φ300 mm vertical Fizeau interferometer based on liquid reference [J].

Ma Z. ;

Chen L. ;

Zheng D. ;

Ma H. ;

Li R. ;

Huang C. ;

Hu C. .

Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2022, 51 (02)

[26] Measurement of surface figure of plane polarization phase-shifting Fizeau optical surfaces with interferometer [J].

Chatterjee, Sanjib ;

Kumar, Y. Pawan ;

Bhaduri, Basanta .

OPTICS AND LASER TECHNOLOGY, 2007, 39 (02) :268-274

[27] Absolute measurement for a 300-mm-aperture vertical interferometer based on compensation of gravity-induced deformation [J].

Wang, Yuntao ;

Chen, Lei ;

Hu, Chenhui ;

Huang, Chen ;

Ma, Zhiyao ;

Ma, Haiying ;

Zheng, Donghui .

OPTICS COMMUNICATIONS, 2021, 493

[28] Simultaneous phase-shifting interferometry study based on the common-path Fizeau Interferometer [J].

Liu Feng-wei ;

Wu Yong-qian .

7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT, 2014, 9282

[29] Simulated grating for absolute measuring the transfer function of 300mm aperture Fizeau interferometer [J].

Shen, Yuhang ;

Qin, Jiaqi ;

Han, Sen ;

Li, Xueyuan ;

Yang, Ying ;

Zhang, Liwei ;

Wang, Yanjun ;

Fu, Chengliang ;

Ji, Linji ;

Wang, Quanzhao ;

Zhang, Bo ;

Zhuang, Jincheng ;

Zhuang, Songlin .

OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS XI, 2024, 13241

[30] Simultaneous phase-shifting Fizeau interferometer based on birefringent thin film and Dammann grating [J].

Zhu, Linglin ;

Zeng, Aijun ;

Huang, Huijie .

2011 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS, 2011, 8201

← 1 2 3 4 5 →