Calibration of a 300-mm-aperture phase-shifting Fizeau interferometer

被引：39
作者：
Oreb, BF
Farrant, DI
Walsh, CJ
Forbes, G
Fairman, PS
机构：
[1] Telecommun & Ind Phys Commonwealth Sci & Ind Res, Lindfield, NSW, Australia
[2] Macquarie Univ, Dept Phys, N Ryde, NSW 2109, Australia
来源：
APPLIED OPTICS | 2000年 / 39卷 / 28期
关键词：
D O I：
10.1364/AO.39.005161
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A 300-mm-aperture digital phase-shifting Fizeau interferometer has been developed in-house for precision metrology of optical components fabricated by the optical workshop at Telecommunications and Industrial Physics, Commonwealth Scientific and Industrial Research Organization. We describe the procedures used in the calibration of the instrument. A reference data file representing the deviations from flatness of the reference surface is generated, measurement uncertainty estimated, and aberrations in the instrument assessed. Measurements on 250-mm-diameter uncoated optical surfaces have consistently shown short-term repeatability of 0.3-nm rms from measurement to measurement and allowed for absolute characterization of these surfaces to within a few nanometers. (C) 2000 Optical Society of America OCIS codes: 120.3180, 120.3940, 120.6650, 120.5050, 120.4570, 120.4800.
引用
收藏
页码：5161 / 5171
页数：11
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