Fabrication of RF-MEMS switches on LTCC substrates using PECVD a-Si as sacrificial layer

被引：5
|
作者：
Cianci, E.
Coppa, A.
Foglietti, V.
Dispenza, M.
Buttiglione, R.
Fiorello, A. M.
Marcelli, R.
Catoni, S.
Pochesci, D.
机构：
[1] CNR, IFN, Inst Photon & Nanotechnol, I-00156 Rome, Italy
[2] SELEX Sistemi Integrati SpA, Engn Unit, Microelect & Photon Dept, I-00131 Rome, Italy
[3] CNR, Inst Microelect & Microsyst, I-00156 Rome, Italy
来源：
MICROELECTRONIC ENGINEERING | 2007年 / 84卷 / 5-8期
关键词：
contact switch; amorphous silicon; dry release; low actuation voltage;
D O I：
10.1016/j.mee.2007.01.096
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
RF micromechanical switches are fabricated using dry releasing techniques. LTCC is used as substrate. Amorphous silicon, as an alternative sacrificial layer to silicon dioxide, has been used followed by dry plasma release. The silicon deposition has been optimized to obtain low mechanical stress and allowing thick sacrificial layer deposition. The use of amorphous silicon extends the flexibility of the design of the devices and of the packaging procedure. (c) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：1401 / 1404
页数：4
相关论文
共 50 条
  • [21] An investigation of dielectric material selection of RF-MEMS switches using Ashby's methodology for RF applications
    Bonthu, Murali Krishna
    Sharma, Ashish Kumar
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2018, 24 (04): : 1803 - 1809
  • [22] The effect of adding an active layer to the structure of a-Si: H solar cells on the efficiency using RF-PECVD
    Prayogi, Soni
    Cahyono, Yoyok
    Iqballudin, Irsyad
    Stchakovsky, Michel
    Darminto, D.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2021, 32 (06) : 7609 - 7618
  • [23] The effect of adding an active layer to the structure of a-Si: H solar cells on the efficiency using RF-PECVD
    Soni Prayogi
    Yoyok Cahyono
    Irsyad Iqballudin
    Michel Stchakovsky
    D. Darminto
    Journal of Materials Science: Materials in Electronics, 2021, 32 : 7609 - 7618
  • [24] RF MEMS switches fabrication by using SU-8 technology
    Andrea Lucibello
    Emanuela Proietti
    Flavio Giacomozzi
    Romolo Marcelli
    Giancarlo Bartolucci
    Giorgio De Angelis
    Microsystem Technologies, 2013, 19 : 929 - 936
  • [25] RF MEMS switches fabrication by using SU-8 technology
    Lucibello, Andrea
    Proietti, Emanuela
    Giacomozzi, Flavio
    Marcelli, Romolo
    Bartolucci, Giancarlo
    De Angelis, Giorgio
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2013, 19 (06): : 929 - 936
  • [26] RF MEMS Switches Fabrication by using SU-8 Technology
    Lucibello, Andrea
    Proietti, Emanuela
    Giacomozzi, Flavio
    Marcelli, Romolo
    Bartolucci, Giancarlo
    De Angelis, Giorgio
    2012 SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS (DTIP), 2012, : 234 - 239
  • [27] Equivalent circuit model of reliable RF-MEMS switches for component synthesis, fabrication process characterization and failure analysis
    Matabosch, Nuria Torres
    Coccetti, Fabio
    Kaynak, Mehmet
    Espana, Beatrice
    Tillack, Bernd
    Cazaux, Jean-Louis
    INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES, 2014, 6 (01) : 73 - 81
  • [28] Impact of Power Handling Capability on Material Selection of RF-MEMS Switches using MCDM Techniques
    Kumari, Raj
    Angira, Mahesh
    2020 6TH IEEE INTERNATIONAL SYMPOSIUM ON SMART ELECTRONIC SYSTEMS (ISES 2020) (FORMERLY INIS), 2020, : 265 - 270
  • [29] Accurate Modeling of Low Actuation Voltage RF-MEMS Switches Using Artificial Neural Networks
    Pak, Amin
    Mafinejad, Yasser
    Kouzani, Abbas
    Nabovati, Hooman
    Mafinezhad, Khalil
    2012 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS (ISCAS 2012), 2012,
  • [30] Experimental evaluation of MIMO antena selection system using RF-MEMS switches on a mobile terminal
    Honda, Atsushi
    Ida, Ichirou
    Oishi, Yasuyuki
    Tran, Quoc Tuan
    Hara, Shinsuke
    Takada, Jun-ichi
    2007 IEEE 18TH INTERNATIONAL SYMPOSIUM ON PERSONAL, INDOOR AND MOBILE RADIO COMMUNICATIONS, VOLS 1-9, 2007, : 2255 - +
12345