Determination of bulk and surface transport properties by photocurrent spectral measurements

被引:9
作者
Castaldini, A
Cavalcoli, D
Cavallini, A
机构
[1] Univ Bologna, INFM, I-40127 Bologna, Italy
[2] Univ Bologna, Dept Phys, I-40127 Bologna, Italy
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2000年 / 71卷 / 03期
关键词
D O I
10.1007/s003390000528
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Reliable minority carrier diffusion length and surface recombination velocity values have been obtained from stationary photocurrent measurements. A modified surface photovoltage method has been used to determine diffusion lengths longer than the wafer thickness in high-purity Si, whereas the spectral variation of the photocurrent has been employed to measure the surface recombination velocity. The novelty presented in this paper is that a Schottky diode has been employed in both the methods to collect generated charged carriers. Moreover the same Schottky diode has been employed in both the methods in order to avoid any a priori assumptions on the material transport parameters. This combined application of the two methods at the same device enables the determination of highly reliable results.
引用
收藏
页码:305 / 310
页数:6
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