Flexible high-frequency microwave inductors and capacitors integrated on a polyethylene terephthalate substrate

被引：61

作者：

Sun, Lei ^{[1
]}

Qin, Guoxuan ^{[1
]}

Huang, Hai ^{[1
]}

Zhou, Han ^{[1
]}

Behdad, Nader ^{[1
]}

Zhou, Weidong ^{[2
]}

Ma, Zhenqiang ^{[1
]}

机构：

[1] Univ Wisconsin, Dept Elect & Comp Engn, Madison, WI 53706 USA

[2] Univ Texas Arlington, Dept Elect Engn, Arlington, TX 76019 USA

来源：

APPLIED PHYSICS LETTERS | 2010年 / 96卷 / 01期

关键词：

capacitors; flexible electronics; inductors; microwave integrated circuits; MIM devices; polymers; Q-factor; thin film transistors; THIN-FILM TRANSISTORS;

D O I：

10.1063/1.3280040

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This letter reports the realization of bendable inductors and capacitors integrated on a polyethylene terephthalate substrate that can operate at high microwave frequencies. A low-temperature fabrication process compatible with flexible thin-film transistors (TFTs) was developed. By employing bendable dielectric materials, spiral inductors and metal-insulator-metal capacitors with high quality factors and high resonance frequencies were demonstrated. The effects of mechanical bending on the performance of inductors and capacitors were also measured and analyzed. These demonstrations combined with previously demonstrated microwave TFTs will lead to flexible radio-frequency and microwave systems in the future.

引用

页数：3

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