Local Anodic Oxidation of Graphene Layers on SiC

被引：8

作者：

Alekseev, P. A. ^{[1
]}

Borodin, B. R. ^{[1
]}

Dunaevskii, M. S. ^{[1
]}

Smirnov, A. N. ^{[2
]}

Davydov, V. Yu. ^{[1
]}

Lebedev, S. P. ^{[1
]}

Lebedev, A. A. ^{[1
]}

机构：

[1] Russian Acad Sci, Ioffe Phys Tech Inst, St Petersburg 194021, Russia

[2] St Petersburg Natl Res Univ Informat Technol Mech, St Petersburg 197101, Russia

来源：

TECHNICAL PHYSICS LETTERS | 2018年 / 44卷 / 05期

关键词：

FILMS;

D O I：

10.1134/S1063785018050024

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A method of local anodic oxidation has been used to obtain graphene-oxide regions on SiC. The change of the surface properties was confirmed by atomic-force microscopy and Raman spectroscopy. Experimental data were obtained on the conductivity, potential, and topography of the oxidized regions. It was shown that the oxidation leads to a rise in the surface potential. A relationship was found between oxidation parameters, such as the scanning velocity and the probe voltage. The method of local anodic oxidation was used to obtain by lithography an similar to 20-nm-wide nanoribbon and an similar to 10-nm-wide nanoconstriction.

引用

页码：381 / 383

页数：3

共 12 条

[1] Fabrication of 10-nm-scale nanoconstrictions in graphene using atomic force microscopy-based local anodic oxidation lithography [J].

Arai, Miho ;

Masubuchi, Satoru ;

Nose, Kenji ;

Mitsuda, Yoshitaka ;

Machida, Tomoki .

JAPANESE JOURNAL OF APPLIED PHYSICS, 2015, 54 (04)

[2] The mechanism of direct laser writing of graphene features into graphene oxide films involves photoreduction and thermally assisted structural rearrangement [J].

Arul, Rakesh ;

Oosterbeek, Reece N. ;

Robertson, John ;

Xu, Guangyuan ;

Jin, Jianyong ;

Simpson, M. Cather .

CARBON, 2016, 99 :423-431

[3] Raman characterization of defects and dopants in graphene [J].

Beams, Ryan ;

Cancado, Luiz Gustavo ;

Novotny, Lukas .

JOURNAL OF PHYSICS-CONDENSED MATTER, 2015, 27 (08)

[4] General equation for the determination of the crystallite size La of nanographite by Raman spectroscopy [J].

Cançado, LG ;

Takai, K ;

Enoki, T ;

Endo, M ;

Kim, YA ;

Mizusaki, H ;

Jorio, A ;

Coelho, LN ;

Magalhaes-Paniago, R ;

Pimenta, MA .

APPLIED PHYSICS LETTERS, 2006, 88 (16)

[5] Local anodic oxidation on hydrogen-intercalated graphene layers: oxide composition analysis and role of the silicon carbide substrate [J].

Colangelo, Francesco ;

Piazza, Vincenzo ;

Coletti, Camilla ;

Roddaro, Stefano ;

Beltram, Fabio ;

Pingue, Pasqualantonio .

NANOTECHNOLOGY, 2017, 28 (10)

[6]

Emtsev KV, 2009, NAT MATER, V8, P203, DOI [10.1038/NMAT2382, 10.1038/nmat2382]

[7]

Han TH, 2012, NAT PHOTONICS, V6, P105, DOI [10.1038/nphoton.2011.318, 10.1038/NPHOTON.2011.318]

[8] Operation of Graphene Transistors at Gigahertz Frequencies [J].

Lin, Yu-Ming ;

Jenkins, Keith A. ;

Valdes-Garcia, Alberto ;

Small, Joshua P. ;

Farmer, Damon B. ;

Avouris, Phaedon .

NANO LETTERS, 2009, 9 (01) :422-426

[9] Fabrication of graphene nanoribbon by local anodic oxidation lithography using atomic force microscope [J].

Masubuchi, S. ;

Ono, M. ;

Yoshida, K. ;

Hirakawa, K. ;

Machida, T. .

APPLIED PHYSICS LETTERS, 2009, 94 (08)

[10] Electric field effect in atomically thin carbon films [J].

Novoselov, KS ;

Geim, AK ;

Morozov, SV ;

Jiang, D ;

Zhang, Y ;

Dubonos, SV ;

Grigorieva, IV ;

Firsov, AA .

SCIENCE, 2004, 306 (5696) :666-669

← 1 2 →