Nanostructured optical waveguide films of TiO2 and WO3 - x for photonic gas sensors

被引：7

作者：

Stankova, N. E. ^{[1
]}

Dimitrov, I. G. ^{[1
]}

Atanasov, P. A. ^{[1
]}

Sakano, T. ^{[2
]}

Yata, Y. ^{[2
]}

Obara, M. ^{[2
]}

机构：

[1] Bulgarian Acad Sci, Inst Elect, BU-1784 Sofia, Bulgaria

[2] Keio Univ, Dept Elect & Elect Engn, Fac Sci & Technol, Kohoku Ku, Yokohama, Kanagawa 2238522, Japan

来源：

THIN SOLID FILMS | 2010年 / 518卷 / 16期

关键词：

TiO2; WO3-x; Nanostructured films; Photonic gas sensors; THIN-FILMS;

D O I：

10.1016/j.tsf.2009.12.040

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Pulsed laser deposition technique was used to fabricate successfully nanostructured optical waveguide films of TiO2 and WO3-x for gas-sensing applications. High-quality mode spectra, consisting of well-defined bright mode lines were observed in the samples with smooth surface. Films' structural, morphological and optical properties as well as the chemical composition were investigated by using x-ray diffraction, scanning electron and atomic force microscopy, UV-VIS-NIR, m-line and x-ray photoelectron spectroscopy, respectively. Gas sensitivity was investigated at room temperature using m-line spectroscopy technique on basis of reversible variations of the refractive index of the samples under gas exposure. Testing scheme recording the bright m-line shift as optical response was proposed. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：4597 / 4602

页数：6

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