Epitaxial La0.67(Sr,Ca)0.33MnO3 films on Si for IR bolometer applications

被引：0

作者：

Grishin, AM ^{[1
]}

Khartsev, SI ^{[1
]}

Kim, JH ^{[1
]}

Lu, J ^{[1
]}

机构：

[1] Royal Inst Technol, Dept Condensed Matter Phys, SE-16440 Stockholm, Kista, Sweden

来源：

INTEGRATION OF ADVANCED MICRO-AND NANOELECTRONIC DEVICES-CRITICAL ISSUES AND SOLUTIONS | 2004年 / 811卷

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D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on processing and properties of La-0.67(Sr,Ca)(0.33)MnO3 (LSCMO) films grown by pulsed laser deposition technique on Si(001) substrates buffered with Bi4Ti3O12/CeO2/YSZ heteroepitaxial layers. X-ray diffraction shows cube-on-cube growth of epitaxial Bi4Ti3O12/CeO2/YSZ/Si heterostructure whereas the LSCMO layer grows in the "diagonal-on-side" manner onto the Bi4Ti3O12 (BTO) template. High resolution TEM images demonstrate sharp interfaces between the buffer layers and LSCMO film as well as rare misfit dislocations on the CeO2/YSZ interface. LSCMO film processing conditions have been optimized to get maximum temperature coefficient of resistivity TCR = 4.4%K-1 and colossal magnetoresistance (CMR) Deltarho/rho similar to 2.9%kOe(-1) @ 294K. Almost ultimate CMR performance at room temperature has been achieved due to successive improvement of c-axis orientation of layers: full widths at half-maximum (FWHM) 0.65, 0.58, 0.65, 1.13 and 0.18 degrees in LSCMO/BTO/CeO2/YSZ/Si stack, respectively. Characterization of electrical noise in CMR film yields noise equivalent temperature difference (NETD) as low as 1.2 muK/rootHz @ 30Hz and 294K.

引用

页码：405 / 410

页数：6

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