Novel SThM nanoprobe for thermal properties investigation of micro- and nanoelectronic devices

被引：29

作者：

Janus, P. ^{[1
]}

Szmigiel, D. ^{[1
]}

Weisheit, M. ^{[2
]}

Wielgoszewski, G. ^{[3
]}

Ritz, Y. ^{[4
]}

Grabiec, P. ^{[1
]}

Hecker, M. ^{[2
]}

Gotszalk, T. ^{[3
]}

Sulecki, P. ^{[3
]}

Zschech, E. ^{[4
]}

机构：

[1] Inst Electr Mat Technol, PL-02668 Warsaw, Poland

[2] Globalfoundries Dresden Module One LLC & Co KG, D-01109 Dresden, Germany

[3] Wroclaw Univ Technol, PL-50372 Wroclaw, Poland

[4] Fraunhofer IZFP, Dresden Branch, D-01109 Dresden, Germany

来源：

MICROELECTRONIC ENGINEERING | 2010年 / 87卷 / 5-8期

关键词：

Atomic Force Microscopy; Scanning Thermal Microscopy;

D O I：

10.1016/j.mee.2009.11.178

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper, we present a novel micromachined Atomic Force Microscopy (AFM) micro-cantilever equipped with a sharp, conductive platinum tip. The processing sequence proposed in this article integrates a high reproducibility and precise post-processing applying Focused Ion Beam tip modification. The cantilever is designed for Scanning Thermal Microscopy (SThM) applications in a standard setup with the optical AFM detection system. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：1370 / 1374

页数：5

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