PZT thin films for microsensors and actuators: Where do we stand?

被引：312
作者：
Muralt, P [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland
来源：
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2000年 / 47卷 / 04期
关键词：
D O I：
10.1109/58.852073
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
This paper reviews deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric properties is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented. The state of the art allows some preliminary conclusions.
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页码：903 / 915
页数：13
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