PZT thin films for microsensors and actuators: Where do we stand?

被引：311

作者：

Muralt, P ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Lab Ceram, CH-1015 Lausanne, Switzerland

来源：

IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL | 2000年 / 47卷 / 04期

关键词：

D O I：

10.1109/58.852073

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

This paper reviews deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric properties is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented. The state of the art allows some preliminary conclusions.

引用

页码：903 / 915

页数：13

共 117 条

[21] TEMPERATURE-TIME TEXTURE TRANSITION OF PB(ZR1-XTIX)O-3 THIN-FILMS .2. HEAT-TREATMENT AND COMPOSITIONAL EFFECTS
CHEN, SY
CHEN, IW
[J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (09) : 2337 - 2344
[22] CHARACTERIZATION OF PIEZOELECTRIC PROPERTIES OF ZINC-OXIDE THIN-FILMS DEPOSITED ON SILICON FOR SENSORS APPLICATIONS
DESCHANVRES, JL
REY, P
DELABOUGLISE, G
LABEAU, M
JOUBERT, JC
PEUZIN, JC
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1992, 33 (1-2) : 43 - 45
[23] THIN-FILM FERROELECTRICS OF PZT BY SOL-GEL PROCESSING
DEY, SK
BUDD, KD
PAYNE, DA
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1988, 35 (01) : 80 - 81
[24] COMPOSITION-CONTROLLED GROWTH OF PBTIO3 ON SRTIO3 BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
DORMANS, GJM
VANVELDHOVEN, PJ
DEKEIJSER, M
[J]. JOURNAL OF CRYSTAL GROWTH, 1992, 123 (3-4) : 537 - 544
[25] PZT thin film actuated elastic fin micromotor
Dubois, MA
Muralt, P
[J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1998, 45 (05) : 1169 - 1177
[26] Measurement of the effective transverse piezoelectric coefficient e31,f of AlN and Pb(Zrx,Ti1-x)O3 thin films
Dubois, MA
Muralt, P
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1999, 77 (02) : 106 - 112
[27] Dubois MA, 1998, INTEGR FERROELECTR, V22, P1055
[28] Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications
Dubois, MA
Muralt, P
[J]. APPLIED PHYSICS LETTERS, 1999, 74 (20) : 3032 - 3034
[29] DUBOIS MA, 1990, THESIS
[30] Flynn A. M., 1992, Journal of Microelectromechanical Systems, V1, P44, DOI 10.1109/84.128055

← 1 2 3 4 5 6 7 8 9 10 →