Diamond-Like Carbon Thin Films Deposition on Glass Using an Electron Cyclotron Resonance (ECR) Microwave Chemical Vapor Deposition (CVD) System

The present study is dealing with the structure and tribological behavior of the diamond-like carbon thin films deposited by the ECR microwave CVD technique on glass. The XPS spectra, friction coefficient and wear life of DLC films provided obviously changes with the bias changes. The highest surface oxidation state and friction coefficient values were measured for the films prepared at -400 V substrate bias voltages. However, the wear life of the DLC films increase dramatically (for about 100 times from -300 V to -700 V bias voltages) with the substrate bias voltage increase monotonously. This improvement of film properties usually is normally accompanied with the energy of impinging ions to the growing film that helps improve the film-substrate interface diffusion and enhance the film-substrate adhesive.