On the mechanism of enhancing the nucleation behavior of UNCD films by Mo-coating

被引：13

作者：

Chen, Huang-Chin ^{[1
]}

Liu, Keng-Fu ^{[2
]}

Tai, Nyan-Hua ^{[2
]}

Pong, Way-Faung ^{[1
]}

Lin, I-Nan ^{[1
]}

机构：

[1] Tamkang Univ, Dept Phys, Tamsui 251, Taiwan

[2] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

来源：

关键词：

Ultra-nanocrystalline diamond films; Molybdenum coating; Transmission electron microscopy; DIAMOND NUCLEATION; GROWTH; SILICON;

D O I：

10.1016/j.diamond.2009.11.020

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Enhanced nucleation behavior for ultra-nanocrystalline diamond on Si-substrates via the utilization of Mo-coating was observed. Spectroscopic examinations indicated that the mechanism of enhancement is the formation of Mo2C phase, which hindered the inward diffusion of carbon species into the substrate materials. The diamonds may either nucleate directly on Mo2C-layer or via the formation of transition phases, the graphite. The incoming carbons may also react with Mo2C phase to form MoC phase or form the graphite phase prior to the induction of diamond nuclei. In all cases. the carbons accumulated rapidly due the presence of a Mo2C (or MoC) layer, triggering the formation of diamond nuclei. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：134 / 137

页数：4

共 14 条

[1] Novel two stage method for growth of highly transparent nano-crystalline diamond films [J].