MEMS reflective wavefront sensor

被引：0

作者：

Andrews, Jonathan R. ^{[1
]}

Teare, Scott W. ^{[2
]}

Restainol, Sergio R. ^{[1
]}

Wick, David ^{[3
]}

Wilcox, Christopher C. ^{[1
]}

Martinez, Ty ^{[1
]}

Payne, Don M. ^{[4
]}

机构：

[1] US Naval, Res Lab, Remote Sensing Div, 3550 Aberdeen Ave SE, Kirtland AFB, NM 87117 USA

[2] New Mexico Inst Min & Technol, Dept Elect Engn, Socorro, NM 87801 USA

[3] Sandia Natl Labs, Albuquerque, NM 87123 USA

[4] Narrascape Inc, Albuquerque, NM 87106 USA

来源：

MEMS ADAPTIVE OPTICS | 2007年 / 6467卷

关键词：

MEMS; wavefront sensor; adaptive optics;

D O I：

10.1117/12.702890

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Sandia National Laboratory has constructed several segmented MEMS deformable mirrors that are under investigation for their suitability in Adaptive Optics systems for the Naval Research Laboratory. These mirrors are constructed in a hexagonal array and have been constructed with flat surfaces, or with optical power allowing each mirror to bring its subaperture of light to a focus similar to a Shack-Hartman array. Each mirror can use the tip, tilt and piston function to move the focused spots to the desired reference location, and the measurement of the applied voltage can be used directly to power a similar flat MEMS deformable mirror. This paper reports on the suitability of this reflective wavefront sensor for closed-loop Adaptive Optics applications.

引用

页数：9

共 50 条

[41] GMTIFS: deformable mirror environmental testing for the on instrument wavefront sensor
Copeland, M.
Price, I.
Rigaut, F.
Bloxham, G.
Boz, R.
Bundy, D.
Espeland, B.
Sharp, R.
ADAPTIVE OPTICS SYSTEMS V, 2016, 9909
[42] MEMS sensor technology
Jiang Zhuangde(Institute of Precision Engineering
Engineering Sciences, 2012, 10 (05) : 16 - 25
[43] Maximum a priori estimation of wavefront slopes using a Hartmann wavefront sensor
Sallberg, SA
Welsh, BM
Roggemann, MC
DIGITAL IMAGE RECOVERY AND SYNTHESIS III, 1996, 2827 : 68 - 78
[44] Review on methods for wavefront reconstruction from pyramid wavefront sensor data
Shatokhina, Iuliia
Hutterer, Victoria
Ramlau, Ronny
JOURNAL OF ASTRONOMICAL TELESCOPES INSTRUMENTS AND SYSTEMS, 2020, 6 (01)
[45] A pyramid wavefront sensor with no dynamic modulation
Ragazzoni, R
Diolaiti, E
Vernet, E
OPTICS COMMUNICATIONS, 2002, 208 (1-3) : 51 - 60
[46] Measurement range of Talbot wavefront sensor
Kotov, Myhaylo M.
Goloborodko, Andrey A.
OPTICAL ENGINEERING, 2017, 56 (01)
[47] Preliminary design of the wavefront sensor for CCAT
Naylor, David
Gom, Brad
Leclerc, Melanie
Legros, Mathieu
Padin, Stephen
Serabyn, Eugene
MILLIMETER, SUBMILLIMETER, AND FAR-INFRARED DETECTORS AND INSTRUMENTATION FOR ASTRONOMY VII, 2014, 9153
[48] The ABLE-ACE wavefront sensor
Butts, RR
LASER RADAR TECHNOLOGY AND APPLICATIONS II, 1997, 3065 : 339 - 354
[49] Plastic Molded Package Technology for MEMS Sensor Evolution of MEMS sensor package
Oouchi, Atsushi
2014 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING (ICEP), 2014, : 371 - 375
[50] The DKIST Low Order Wavefront Sensor
Johansson, Erik
Cummings, Keith
Drobilek, Mark
Johnson, Luke
Richards, Kit
Rampy, Rachel
Woger, Friedrich
ADAPTIVE OPTICS SYSTEMS VI, 2018, 10703

← 1 2 3 4 5 →