MEMS reflective wavefront sensor

被引：0
作者：
Andrews, Jonathan R. [1 ]
Teare, Scott W. [2 ]
Restainol, Sergio R. [1 ]
Wick, David [3 ]
Wilcox, Christopher C. [1 ]
Martinez, Ty [1 ]
Payne, Don M. [4 ]
机构：
[1] US Naval, Res Lab, Remote Sensing Div, 3550 Aberdeen Ave SE, Kirtland AFB, NM 87117 USA
[2] New Mexico Inst Min & Technol, Dept Elect Engn, Socorro, NM 87801 USA
[3] Sandia Natl Labs, Albuquerque, NM 87123 USA
[4] Narrascape Inc, Albuquerque, NM 87106 USA
来源：
MEMS ADAPTIVE OPTICS | 2007年 / 6467卷
关键词：
MEMS; wavefront sensor; adaptive optics;
D O I：
10.1117/12.702890
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Sandia National Laboratory has constructed several segmented MEMS deformable mirrors that are under investigation for their suitability in Adaptive Optics systems for the Naval Research Laboratory. These mirrors are constructed in a hexagonal array and have been constructed with flat surfaces, or with optical power allowing each mirror to bring its subaperture of light to a focus similar to a Shack-Hartman array. Each mirror can use the tip, tilt and piston function to move the focused spots to the desired reference location, and the measurement of the applied voltage can be used directly to power a similar flat MEMS deformable mirror. This paper reports on the suitability of this reflective wavefront sensor for closed-loop Adaptive Optics applications.
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页数：9
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