EFFECT OF PIEZOELECTRIC LAYERS ON THE SIZE-DEPENDENT PULL-IN INSTABILITY ANALYSIS OF ELECTROSTATICALLY ACTUATED MEMS

被引：0

作者：

Wang, Bing-lei ^{[1
]}

Zhang, Long ^{[1
]}

Xiao, Yue ^{[1
,2
]}

机构：

[1] Shandong Univ, Sch Civil Engn, Dept Engn Mech, Jinan 250061, Peoples R China

[2] Peking Univ, Dept Mech & Engn Sci, Coll Engn, Beijing 100871, Peoples R China

来源：

PROCEEDINGS OF THE 2015 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS | 2015年

关键词：

Pull-in voltage; Piezoelectric layer; Size effect; Modified couple stress theory; MODEL; VOLTAGE;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

With piezoelectric layers attached, the electrostatically actuated microbeam-based MEMS (Micro-Electro-Mechanical Systems) is modelled to study the pull-in instability based on a modified couple stress theory. The nonlinear differential governing equation and boundary conditions of the beam are derived by using Hamilton's principle. The results show that the piezoelectric layers can decrease the pull-in voltage by only applying very small voltage on the MEMS. The study may be helpful to characterize the mechanical and electrostatic properties of small size MEMS, or guide the design of microbeam-based devices for a wide range of potential applications.

引用

页码：519 / 522

页数：4