EFFECT OF PIEZOELECTRIC LAYERS ON THE SIZE-DEPENDENT PULL-IN INSTABILITY ANALYSIS OF ELECTROSTATICALLY ACTUATED MEMS

被引：0

作者：

Wang, Bing-lei ^{[1
]}

Zhang, Long ^{[1
]}

Xiao, Yue ^{[1
,2
]}

机构：

[1] Shandong Univ, Sch Civil Engn, Dept Engn Mech, Jinan 250061, Peoples R China

[2] Peking Univ, Dept Mech & Engn Sci, Coll Engn, Beijing 100871, Peoples R China

来源：

PROCEEDINGS OF THE 2015 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS | 2015年

关键词：

Pull-in voltage; Piezoelectric layer; Size effect; Modified couple stress theory; MODEL; VOLTAGE;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

With piezoelectric layers attached, the electrostatically actuated microbeam-based MEMS (Micro-Electro-Mechanical Systems) is modelled to study the pull-in instability based on a modified couple stress theory. The nonlinear differential governing equation and boundary conditions of the beam are derived by using Hamilton's principle. The results show that the piezoelectric layers can decrease the pull-in voltage by only applying very small voltage on the MEMS. The study may be helpful to characterize the mechanical and electrostatic properties of small size MEMS, or guide the design of microbeam-based devices for a wide range of potential applications.

引用

页码：519 / 522

页数：4

共 12 条

[1] Modeling the influence of surface effect and molecular force on pull-in voltage of rotational nano-micro mirror using 2-DOF model [J].

Beni, Y. Tadi ;

Koochi, A. ;

Kazemi, A. S. ;

Abadyan, M. .

CANADIAN JOURNAL OF PHYSICS, 2012, 90 (10) :963-974

[2] The mechanical strength of polysilicon films: Part 2. Size effects associated with elliptical and circular perforations [J].

Chasiotis, I ;

Knauss, WG .

JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 2003, 51 (08) :1551-1572

[3] Hybrid piezo-electrostatic inkjet head for printed electronics [J].

Choi, K. H. ;

Muhammad, N. M. ;

Rehmani, M. A. A. ;

Kim, D. S. .

PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 2012, 226 (C3) :842-857

[4] A pull-in parameter analysis for the cantilever NEMS actuator model including surface energy, fringing field and Casimir effects [J].

Duan, Jun-Sheng ;

Rach, Randolph .

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2013, 50 (22-23) :3511-3518

[5] A microstructure-dependent Timoshenko beam model based on a modified couple stress theory [J].

Ma, H. M. ;

Gao, X-L ;

Reddy, J. N. .

JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 2008, 56 (12) :3379-3391

[6] Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage [J].

Rezazadeh, Ghader ;

Tahmasebi, Ahmadali ;

Zubstov, Mikhail .

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2006, 12 (12) :1163-1170

[7] A new Kirchhoff plate model based on a modified couple stress theory [J].

Tsiatas, G. C. .

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2009, 46 (13) :2757-2764

[8] Nonlinear non-classical microscale beams: Static bending, postbuckling and free vibration [J].

Xia, W. ;

Wang, L. ;

Yin, L. .

INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE, 2010, 48 (12) :2044-2053

[9] Pull-in voltage analysis of electrostatically actuated MEMS with piezoelectric layers: A size-dependent model [J].

Xiao, Yue ;

Wang, Binglei ;

Zhou, Shenjie .

MECHANICS RESEARCH COMMUNICATIONS, 2015, 66 :7-14

[10] Couple stress based strain gradient theory for elasticity [J].

Yang, F ;

Chong, ACM ;

Lam, DCC ;

Tong, P .

INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES, 2002, 39 (10) :2731-2743

← 1 2 →