Roll angle measurement system based on differential plane mirror interferometer

被引：20

作者：

Shi, Kai ^{[1
]}

Su, Junhong ^{[1
]}

Hou, Wenmei ^{[2
]}

机构：

[1] Xian Technol Univ, Sch Optoelect Engn, 2 Xuefu Rd, Xian 710021, Shaanxi, Peoples R China

[2] Univ Shanghai Sci & Technol, Sch Opt Elect & Comp Engn, 516 Jungong Rd, Shanghai 200093, Peoples R China

来源：

OPTICS EXPRESS | 2018年 / 26卷 / 16期

基金：

中国国家自然科学基金;

关键词：

MACHINE-TOOLS; ERRORS; COMPENSATION; DISPLACEMENT;

D O I：

10.1364/OE.26.019826

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A precision roll angle measurement system based on differential plane mirror interferometer (DPMI) is proposed and the measurement principle has been analyzed theoretically in detail. This system uses DPMI with wedgy angle prism and wedgy angle reflector to produce diagonal symmetry of the two frequency beams. The residual of nanopositioning stage and roll angle system is less than 1 mu rad, which has verified the correctness of the measuring principle. As result, the stability of the roll angle measurement system is satisfactory, and the average deviation of measurement experiments is less than 5 mu rad. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：19826 / 19834

页数：9

共 22 条

[11] Enhanced roll-angle measurement interferometer [J].

Ju, Aisong ;

Hou, Wenmei ;

Le, Yanfen .

OPTICAL ENGINEERING, 2015, 54 (03)

[12] Developed of a Multi-Degree of Freedoms Measuring System and an error compensation technique for machine tools [J].

Jywe, Wen-Yuh ;

Liu, Chien-Hung ;

Shien, W. H. ;

Shyu, Lih-Horng ;

Fang, Te-Hua ;

Sheu, Yung-Hoh ;

Hsu, Tung-Hui ;

Hsieh, Chi-Chen .

4th International Symposium on Instrumentation Science and Technology (ISIST' 2006), 2006, 48 :761-765

[13] Non-bar, an optical calibration system for five-axis CNC machine tools [J].

Jywe, Wenyuh ;

Hsu, Tung-Hui ;

Liu, C. -H. .

INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2012, 59 :16-23

[14] A high-precision five-degree-of-freedom measurement system based on laser collimator and interferometry techniques [J].

Kuang, Cuifang ;

Hong, En ;

Ni, Jun .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (09)

[15]

Kurtoglu A., 1990, CIRP ANN-MANUF TECHN, V39, P417, DOI [10.1016/S0007-8506(07)61086-5, DOI 10.1016/S0007-8506(07)61086-5]

[16] High-sensitivity roll-angle interferometer [J].

Le, Yanfen ;

Hou, Wenmei ;

Hu, Kai ;

Shi, Kai .

OPTICS LETTERS, 2013, 38 (18) :3600-3603

[17] Development of a laser-based high-precision six-degrees-of-freedom motion errors measuring system for linear stage [J].

Liu, CH ;

Jywe, WY ;

Hsu, CC ;

Hsu, TH .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2005, 76 (05)

[18] Vertical machining center accuracy characterization using laser interferometer - Part 2. Angular errors [J].

Okafor, AC ;

Ertekin, YM .

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2000, 105 (03) :407-420

[19] CHARACTERIZATION OF CNC MACHINING CENTERS [J].

SHIN, YC ;

CHIN, H ;

BRINK, MJ .

JOURNAL OF MANUFACTURING SYSTEMS, 1991, 10 (05) :407-421

[20] Design, fabrication, and verification of a three-dimensional autocollimator [J].

Yin, Yanhe ;

Cai, Sheng ;

Qiao, Yanfeng .

APPLIED OPTICS, 2016, 55 (35) :9986-9991

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