Roll angle measurement system based on differential plane mirror interferometer

被引：20

作者：

Shi, Kai ^{[1
]}

Su, Junhong ^{[1
]}

Hou, Wenmei ^{[2
]}

机构：

[1] Xian Technol Univ, Sch Optoelect Engn, 2 Xuefu Rd, Xian 710021, Shaanxi, Peoples R China

[2] Univ Shanghai Sci & Technol, Sch Opt Elect & Comp Engn, 516 Jungong Rd, Shanghai 200093, Peoples R China

来源：

OPTICS EXPRESS | 2018年 / 26卷 / 16期

基金：

中国国家自然科学基金;

关键词：

MACHINE-TOOLS; ERRORS; COMPENSATION; DISPLACEMENT;

D O I：

10.1364/OE.26.019826

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A precision roll angle measurement system based on differential plane mirror interferometer (DPMI) is proposed and the measurement principle has been analyzed theoretically in detail. This system uses DPMI with wedgy angle prism and wedgy angle reflector to produce diagonal symmetry of the two frequency beams. The residual of nanopositioning stage and roll angle system is less than 1 mu rad, which has verified the correctness of the measuring principle. As result, the stability of the roll angle measurement system is satisfactory, and the average deviation of measurement experiments is less than 5 mu rad. (c) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：19826 / 19834

页数：9

共 22 条

[1] Developments at PTB in nanometrology for support of the semiconductor industry [J].

Bosse, H ;

Wilkening, G .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2005, 16 (11) :2155-2166

[2] Measurement of two-dimensional small angle deviation with a prism interferometer [J].

Chatterjee, Sanjib ;

Kumar, Y. Pavan .

APPLIED OPTICS, 2008, 47 (27) :4900-4906

[3] A heterodyne straightness and displacement measuring interferometer with laser beam drift compensation for long-travel linear stage metrology [J].

Chen, Benyong ;

Cheng, Liang ;

Yan, Liping ;

Zhang, Enzheng ;

Lou, Yingtian .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2017, 88 (03)

[4]

DORNDORF U, 1994, J ENG IND-T ASME, V116, P42, DOI 10.1115/1.2901808

[5]

Eman K., 1987, CIRP ANN-MANUF TECHN, V36, P253

[6] Development of a simple system for simultaneously measuring 6DOF geometric motion errors of a linear guide [J].

Feng Qibo ;

Zhang Bin ;

Cui Cunxing ;

Kuang Cuifang ;

Zhai Yusheng ;

You Fenglin .

OPTICS EXPRESS, 2013, 21 (22) :25805-25819

[7] A new error measurement method to identify all six error parameters of a rotational axis of a machine tool [J].

He, Zhenya ;

Fu, Jianzhong ;

Zhang, Liangchi ;

Yao, Xinhua .

INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2015, 88 :1-8

[8]

Hou W. M., 2012, US Patent, Patent No. 8325348

[9] INVESTIGATION AND COMPENSATION OF THE NONLINEARITY OF HETERODYNE INTERFEROMETERS [J].

HOU, WM ;

WILKENING, G .

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1992, 14 (02) :91-98

[10] Development of a grating-based interferometer for six-degree-of-freedom displacement and angle measurements [J].

Hsieh, Hung-Lin ;

Pan, Ssu-Wen .

OPTICS EXPRESS, 2015, 23 (03) :2451-2465

← 1 2 3 →