Analytical modelling of the electromechanical coupling of cantilever beams

被引：10

作者：

Chaffey, J ^{[1
]}

Austin, M ^{[1
]}

机构：

[1] RMIT Univ, Sch Elect & Comp Engn, Melbourne, Vic 3001, Australia

来源：

SMART STRUCTURES, DEVICES, AND SYSTEMS | 2002年 / 4935卷

关键词：

pull-in voltage; electrostatic modelling; cantilever beam; MEMS design; Coventorware;

D O I：

10.1117/12.469085

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The coupled interaction between the mechanical deflection of a cantilever beam and an applied electrostatic field is a non-linear problem. A simple and efficient model is desirable in the initial design phase of MEMS structures. A new analytical model is developed which is versatile and applicable to complex cantilever structures. The model is verified and compared to current analytical approaches and Coventorware. The model is used to examine the novel electromechanical properties of double cantilever beams. Double cantilever beams exhibit a minimum pull-in voltage when the overlap distance between the beams is one half the length of the beams. This result has application to tunable micro-cantilever switches, and the geometrical relationship of the cantilever beam to dynamic range of the switching voltage is discussed.

引用

页码：86 / 93

页数：8