Electron ptychographic phase imaging of light elements in crystalline materials using Wigner distribution deconvolution

被引:66
作者
Yang, Hao [1 ]
MacLaren, Ian [2 ]
Jones, Lewys [3 ]
Martinez, Gerardo T. [3 ]
Simson, Martin [4 ]
Huth, Martin [4 ]
Ryll, Henning [5 ]
Soltau, Heike [4 ]
Sagawa, Ryusuke [6 ]
Kondo, Yukihito [6 ]
Ophus, Colin [1 ]
Ercius, Peter [1 ]
Jin, Lei [7 ]
Kovacs, Andras [7 ]
Nellist, Peter D. [3 ]
机构
[1] Lawrence Berkeley Natl Lab, Mol Foundry, Berkeley, CA 94720 USA
[2] Univ Glasgow, Sch Phys & Astron, Glasgow G12 8QQ, Lanark, Scotland
[3] Univ Oxford, Dept Mat, Parks Rd, Oxford OX1 3PH, England
[4] PNDetector GmbH, Otto Hahn Ring 6, D-81739 Munich, Germany
[5] PNSensor GmbH, Otto Hahn Ring 6, D-81739 Munich, Germany
[6] JEOL Ltd, 3-1-2 Musashino, Akishima, Tokyo 1968558, Japan
[7] Forschungszentrum Julich, Ernst Ruska Ctr ER C Microscopy & Spect Electrons, D-52425 Julich, Germany
基金
英国工程与自然科学研究理事会;
关键词
4D-STEM; Pixelated detectors; Ptychography; Phase retrieval; Wigner distribution deconvolution; RESOLUTION; MICROSCOPY; CONTRAST; DIFFRACTION;
D O I
10.1016/j.ultramic.2017.02.006
中图分类号
TH742 [显微镜];
学科分类号
摘要
Recent development in fast pixelated detector technology has allowed a two dimensional diffraction pattern to be recorded at every probe position of a two dimensional raster scan in a scanning transmission electron microscope (STEM), forming an information-rich four dimensional (4D) dataset. Electron ptychography has been shown to enable efficient coherent phase imaging of weakly scattering objects from a 4D dataset recorded using a focused electron probe, which is optimised for simultaneous incoherent Z-contrast imaging and spectroscopy in STEM. Therefore coherent phase contrast and incoherent Z-contrast imaging modes can be efficiently combined to provide a good sensitivity of both light and heavy elements at atomic resolution. In this work, we explore the application of electron ptychography for atomic resolution imaging of strongly scattering crystalline specimens, and present experiments on imaging crystalline specimens including samples containing defects, under dynamical channelling conditions using an aberration corrected microscope. A ptychographic reconstruction method called Wigner distribution deconvolution (WDD) was implemented. Experimental results and simulation results suggest that ptychography provides a readily interpretable phase image and great sensitivity for imaging light elements at atomic resolution in relatively thin crystalline materials. (C) 2017 The Authors. Published by Elsevier B.V.
引用
收藏
页码:173 / 179
页数:7
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