Sputtering an exterior metal coating on copper enclosure for large-scale growth of single-crystalline graphene

被引:19
作者
Luo, Birong [1 ]
Caridad, Jose M. [1 ]
Whelan, Patrick R. [1 ]
Thomsen, Joachim Dahl [1 ]
Mackenzie, David M. A. [1 ]
Cabo, Antonija Grubisic [2 ]
Mahatha, Sanjoy K. [2 ]
Bianchi, Marco [2 ]
Hofmann, Philip [2 ]
Jepsen, Peter Uhd [3 ]
Boggild, Peter [1 ]
Booth, Timothy J. [1 ]
机构
[1] Tech Univ Denmark, DTU Nanotech, 345E, DK-2800 Lyngby, Denmark
[2] Aarhus Univ, Dept Phys & Astron, Interdisciplinary Nanosci Ctr, DK-8000 Aarhus C, Denmark
[3] Tech Univ Denmark, DTU Foton, Orsteds Plads Bldg 343, DK-2800 Lyngby, Denmark
基金
新加坡国家研究基金会;
关键词
graphene; chemical vapor deposition; copper enclosure; sputter; single-crystal; MONOLAYER GRAPHENE; HIGH-QUALITY; OXYGEN; NUCLEATION; DEPOSITION; HYDROGEN; DOMAINS; GRAINS; FOILS; FILMS;
D O I
10.1088/2053-1583/aa85d5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We show the suppression of nucleation density in chemical vapor deposited graphene through the use of a sputtered metal coating on the exterior of a copper catalyst enclosure, resulting in the growth of sub-centimeter scale single crystal graphene domains and complete elimination of multilayer growth. The sputtered coating suppresses nucleation density by acting as both a diffusion barrier and as a sink for excess carbon during the growth, reducing the carbon concentration in the interior of the enclosure. Field effect mobility of hBN-templated devices fabricated from graphene domains grown in this way show room temperature carrier mobilities of 12 000 cm(2) V-1 s(-1) and an absence of weak localization at low temperature. These results indicate a very low concentration of line and point defects in the grown films, which is further supported by Raman and transmission electron microscopic characterization.
引用
收藏
页数:10
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