Defect studies in HVPE GaN by positron annihilation spectroscopy

被引:7
|
作者
Tuomisto, Filip [1 ]
机构
[1] Helsinki Univ Technol, Phys Lab, FI-02015 Helsinki, Finland
来源
GALLIUM NITRIDE MATERIALS AND DEVICES II | 2007年 / 6473卷
关键词
GaN; HVPE; vacancy; positron annihilation;
D O I
10.1117/12.697892
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We have used positron annihilation spectroscopy to study GaN grown by hydride vapor epitaxy. Our results imply that Ga vacancies in GaN are the dominant intrinsic acceptor defects in n-type nominally undoped pure material. Our experiments also show the universal role of the Ga vacancy as the most important compensating acceptor over four orders of magnitude of intentional oxygen doping. We have been able to identify the in-grown Ga vacancy-related defects as VGa-ON pairs and to determine both the binding energy of the pair as well as the formation energy of the isolated Ga vacancy. The experiments performed in polar homo-epitaxial GaN and non-polar hetero-epitaxial GaN give support for a growth-surface-dependent defect incorporation model. On the other hand, the incorporation of impurities in hetero-epitaxial Ga-polar GaN seems to be dominated by effects related to extended defects such as dislocations. The preliminary results obtained in electron irradiated GaN show that negatively charged isolated Ga vacancies are produced together with non-open volume negative ion-type defects when 2-MeV electrons are used, while neutral N vacancy related defects seem to trap positrons in the material irradiated with 0.45 MeV electrons.
引用
收藏
页数:14
相关论文
共 50 条
  • [1] Control of vacancy-type defects in Mg implanted GaN studied by positron annihilation spectroscopy
    Uedono, Akira
    Dickmann, Marcel
    Egger, Werner
    Hugenschmidt, Christoph
    Ishibashi, Shoji
    Chichibu, Shigefusa F.
    GALLIUM NITRIDE MATERIALS AND DEVICES XV, 2020, 11280
  • [2] Defect formation and annealing behaviors of fluorine-implanted GaN layers revealed by positron annihilation spectroscopy
    Wang, M. J.
    Yuan, L.
    Cheng, C. C.
    Beling, C. D.
    Chen, K. J.
    APPLIED PHYSICS LETTERS, 2009, 94 (06)
  • [3] Defect imaging of structural objects using positron annihilation spectroscopy
    Hunt, AW
    Spaulding, R
    Urban-Klaehn, J
    Harmon, JF
    Wells, DP
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 241 (1-4): : 262 - 266
  • [4] Defect-Related Luminescence in Undoped GaN Grown by HVPE
    M.A. Reshchikov
    A. Usikov
    H. Helava
    Yu. Makarov
    Journal of Electronic Materials, 2015, 44 : 1281 - 1286
  • [5] Defect-Related Luminescence in Undoped GaN Grown by HVPE
    Reshchikov, M. A.
    Usikov, A.
    Helava, H.
    Makarov, Yu.
    JOURNAL OF ELECTRONIC MATERIALS, 2015, 44 (05) : 1281 - 1286
  • [6] Positron annihilation spectroscopy
    Sundar, CS
    Viswanathan, B
    METALS MATERIALS AND PROCESSES, 1996, 8 (01): : 1 - 8
  • [7] Studies of recrystallization in rhenium using positron annihilation spectroscopy
    Dryzek, Jerzy
    Wrobel, Miroslaw
    SCRIPTA MATERIALIA, 2022, 221
  • [8] Defect investigations via positron annihilation spectroscopy on proton implanted silicon
    Schriefl, A. J.
    Sgouridis, S.
    Schustereder, W.
    Puff, W.
    GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY XIV, 2011, 178-179 : 319 - +
  • [9] Defects in nitrides, positron annihilation spectroscopy
    Tuomisto, Filip
    GALLIUM NITRIDE MATERIALS AND DEVICES VIII, 2013, 8625
  • [10] Characterization of defect accumulation in neutron-irradiated Mo by positron annihilation spectroscopy
    Eldrup, M.
    Li, Meimei
    Snead, L. L.
    Zinkle, S. J.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2008, 266 (16): : 3602 - 3606