Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB2-MoSi2 Target

被引：17

作者：

Kiryukhantsev-Korneev, Philipp ^{[1
]}

Sytchenko, Alina ^{[1
]}

Pogozhev, Yuriy ^{[1
]}

Vorotilo, Stepan ^{[1
]}

Orekhov, Anton ^{[1
,2
]}

Loginov, Pavel ^{[1
]}

Levashov, Evgeny ^{[1
]}

机构：

[1] Natl Univ Sci & Technol MISiS, Sci Educ Ctr SHS, Moscow 119049, Russia

[2] Russian Acad Sci, Fed Sci Res Ctr Crystallog & Photon, Lab Electron Diffract, Leninsky Prospect 59, Moscow 119333, Russia

来源：

MATERIALS | 2021年 / 14卷 / 08期

关键词：

magnetron sputtering; coating; ZrB2; MoSi2; Zr-Mo-Si-B-(N); structure; mechanical and tribological properties; oxidation resistance;

D O I：

10.3390/ma14081932

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB2-MoSi2 targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spectroscopy. Mechanical and tribological properties were measured using nanoindentation and pin-on-disc testing. Oxidation resistance and oxidation kinetics were estimated via annealing in air at 1000-1500 degrees C and precision weight measurements. We found that the coatings deposited in Ar demonstrate a superior combination of properties, including hardness of 36 GPa, elastic recovery of 84%, a friction coefficient of 0.6, and oxidation resistance at temperatures up to 1200 degrees C. High oxidation resistance is realized due to the formation of the protective (SiO2 + ZrO2)/SiO2 oxide layer, which inhibits the diffusion of oxygen into the coating.

引用

页数：13

共 34 条

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[33] Structure and Properties of Coatings in the Cr-B-C-N System Obtained Using a CrB2 Cathode by the Method of Pulsed Cathode-Arc Evaporation P-CAE in Ar, N2, and C2H4 Media
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[34] The Influence of H, W, H/E, H3/E2, Structure and Chemical Composition on the Resistance of Ti-B-(N), Mo-B-(N), Cr-B-(N), and Zr-B-(N) Coatings to Cyclic Impact Loading
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