Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB2-MoSi2 Target

被引：17
作者：
Kiryukhantsev-Korneev, Philipp [1 ]
Sytchenko, Alina [1 ]
Pogozhev, Yuriy [1 ]
Vorotilo, Stepan [1 ]
Orekhov, Anton [1 ,2 ]
Loginov, Pavel [1 ]
Levashov, Evgeny [1 ]
机构：
[1] Natl Univ Sci & Technol MISiS, Sci Educ Ctr SHS, Moscow 119049, Russia
[2] Russian Acad Sci, Fed Sci Res Ctr Crystallog & Photon, Lab Electron Diffract, Leninsky Prospect 59, Moscow 119333, Russia
来源：
MATERIALS | 2021年 / 14卷 / 08期
关键词：
magnetron sputtering; coating; ZrB2; MoSi2; Zr-Mo-Si-B-(N); structure; mechanical and tribological properties; oxidation resistance;
D O I：
10.3390/ma14081932
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB2-MoSi2 targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spectroscopy. Mechanical and tribological properties were measured using nanoindentation and pin-on-disc testing. Oxidation resistance and oxidation kinetics were estimated via annealing in air at 1000-1500 degrees C and precision weight measurements. We found that the coatings deposited in Ar demonstrate a superior combination of properties, including hardness of 36 GPa, elastic recovery of 84%, a friction coefficient of 0.6, and oxidation resistance at temperatures up to 1200 degrees C. High oxidation resistance is realized due to the formation of the protective (SiO2 + ZrO2)/SiO2 oxide layer, which inhibits the diffusion of oxygen into the coating.
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页数：13
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