Structure and Properties of Zr-Mo-Si-B-(N) Hard Coatings Obtained by d.c. Magnetron Sputtering of ZrB2-MoSi2 Target

被引：17

作者：

Kiryukhantsev-Korneev, Philipp ^{[1
]}

Sytchenko, Alina ^{[1
]}

Pogozhev, Yuriy ^{[1
]}

Vorotilo, Stepan ^{[1
]}

Orekhov, Anton ^{[1
,2
]}

Loginov, Pavel ^{[1
]}

Levashov, Evgeny ^{[1
]}

机构：

[1] Natl Univ Sci & Technol MISiS, Sci Educ Ctr SHS, Moscow 119049, Russia

[2] Russian Acad Sci, Fed Sci Res Ctr Crystallog & Photon, Lab Electron Diffract, Leninsky Prospect 59, Moscow 119333, Russia

来源：

MATERIALS | 2021年 / 14卷 / 08期

关键词：

magnetron sputtering; coating; ZrB2; MoSi2; Zr-Mo-Si-B-(N); structure; mechanical and tribological properties; oxidation resistance;

D O I：

10.3390/ma14081932

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Coatings in a Zr-Mo-Si-B-N system were deposited by the magnetron sputtering of ZrB2-MoSi2 targets in argon and nitrogen. The structure of the coatings was investigated using scanning electron microscopy, X-ray diffraction, energy-dispersive spectroscopy, and glow-discharge optical emission spectroscopy. Mechanical and tribological properties were measured using nanoindentation and pin-on-disc testing. Oxidation resistance and oxidation kinetics were estimated via annealing in air at 1000-1500 degrees C and precision weight measurements. We found that the coatings deposited in Ar demonstrate a superior combination of properties, including hardness of 36 GPa, elastic recovery of 84%, a friction coefficient of 0.6, and oxidation resistance at temperatures up to 1200 degrees C. High oxidation resistance is realized due to the formation of the protective (SiO2 + ZrO2)/SiO2 oxide layer, which inhibits the diffusion of oxygen into the coating.

引用

页数：13

共 34 条

[1] Transparency Effect in Zr−B−N Coatings Obtained by Magnetron Sputtering of ZrB2 Target
Ph. V. Kiryukhantsev-Korneev
E. A. Levashov
Technical Physics Letters, 2020, 46 : 179 - 181
[2] Transparency Effect in Zr-B-N Coatings Obtained by Magnetron Sputtering of ZrB2 Target
Kiryukhantsev-Korneev, Ph. V.
Levashov, E. A.
TECHNICAL PHYSICS LETTERS, 2020, 46 (02) : 179 - 181
[3] Effects of doping with Zr and Hf on the structure and properties of Mo-Si-B coatings obtained by magnetron sputtering of composite targets
Kiryukhantsev-Korneev, Ph. V.
Sytchenko, A. D.
Sviridova, T. A.
Sidorenko, D. A.
Andreev, N. V.
Klechkovskaya, V. V.
Polcak, J.
Levashov, E. A.
SURFACE & COATINGS TECHNOLOGY, 2022, 442
[4] Structure, Corrosion Resistance, Mechanical and Tribological Properties of ZrB2 and Zr-B-N Coatings
Kiryukhantsev-Korneev, Philipp
Sytchenko, Alina
Kaplanskii, Yuriy
Sheveyko, Alexander
Vorotilo, Stepan
Levashov, Evgeny
METALS, 2021, 11 (08)
[5] Mechanical Properties and Heat Resistance of Ta–Zr–Si–B–C–N Coatings Obtained upon the Magnetron Sputtering of the TaZrSiB Target in Ar, N2, and C2H4 Atmosphere
Ph. V. Kiryukhantsev-Korneev
A. D. Sytchenko
E. A. Levashov
T. A. Lobova
Russian Journal of Non-Ferrous Metals, 2020, 61 : 732 - 738
[6] Effect of nitrogen on the structure and properties of Zr-Si-B-N coatings deposited by magnetron sputtering
Kiryukhantsev-Korneev, Ph. V.
Sytchenko, A. D.
Kozlova, N. S.
Zabelina, E. V.
Sidorenko, D. A.
Levashov, E. A.
Feng, P.
SURFACE & COATINGS TECHNOLOGY, 2023, 474
[7] Mechanical Properties and Heat Resistance of Ta-Zr-Si-B-C-N Coatings Obtained upon the Magnetron Sputtering of the TaZrSiB Target in Ar, N2, and C2H4 Atmosphere
Kiryukhantsev-Korneev, Ph. V.
Sytchenko, A. D.
Levashov, E. A.
Lobova, T. A.
RUSSIAN JOURNAL OF NON-FERROUS METALS, 2020, 61 (06) : 732 - 738
[8] The effect of the Ar/N2 gas ratio on the structure and properties of Ta-Si-N coatings produced by magnetron sputtering of TaSi2 target
Sytchenko, A. D.
Kozlova, N. S.
Zabelina, E. V.
Levashov, E. A.
Kiryukhantsev-Korneev, Ph. V.
SURFACES AND INTERFACES, 2023, 37
[9] Structure and Properties of the Al–B–Si–C Coatings Deposited by Magnetron Sputtering
A. O. Kozak
V. I. Ivashchenko
P. L. Scrynskyy
V. B. Muratov
V. V. Tetyorkin
A. V. Sukach
O. K. Sinelnichenko
O. I. Olifan
Journal of Superhard Materials, 2020, 42 : 311 - 322
[10] Study of ZrSiB Coatings Obtained by Magnetron Sputtering of ZrB2-20%Si and ZrB2-50%ZrSi2 Cathodes
Kiryukhantsev-Korneev, F. V.
Yatsyuk, I. V.
PHYSICS OF ATOMIC NUCLEI, 2019, 82 (11) : 1437 - 1440

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