Dust particle formation in a low pressure CH4-N2 radio-frequency (13.56 MHz) plasma.

被引：0

作者：

Geraud-Grenier, I ^{[1
]}

Massereau-Guilbaud, V ^{[1
]}

Plain, A ^{[1
]}

机构：

[1] Univ Orleans, Fac Sci, LASEP, F-18028 Bourges, France

来源：

HIGH TEMPERATURE MATERIAL PROCESSES | 2004年 / 8卷 / 01期

关键词：

nanoparticle; dusty plasma; amorphous hydrogenated carbon nitride;

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Polymer-like hydrogenated amorphous carbon nitride (a-CNx:H) nanoparticles are observed in a CH4(50 %)/N-2(50 %) rf plasma. SEM micrographs show that the dust particles are spherical with diameters in the range 0.2-1.1 mum for rf powers in the range 40-120 W. They are trapped in the plasma bulk volume. The absorption spectra of the a-CNx:H particles reveal the presence of C-H, C=N and Cequivalent toN bonds. The absorption peak intensities strongly depend on the incident rf power. The Cequivalent toN triple bonds increase with the rf power whereas the C-H bonds decrease.

引用

页码：23 / 30

页数：8

共 25 条

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