A Compact Fiber Optic Fabry-Perot Sensor for Simultaneous Measurement of Acoustic and Temperature

被引：22

作者：

Liu, Xiaoying ^{[1
,2
]}

Jiang, Junfeng ^{[1
,2
]}

Wang, Shuang ^{[1
,2
]}

Liu, Kun ^{[1
,2
]}

Xue, Lei ^{[1
,3
]}

Wang, Xue ^{[1
,2
]}

Ma, Zhe ^{[1
,2
]}

Zhang, Xuezhi ^{[1
,2
]}

Zhang, Yongning ^{[1
,2
]}

Liu, Tiegen ^{[1
,2
]}

机构：

[1] Tianjin Univ, Sch Precis Instrument & Optoelect Engn, Tianjin 300072, Peoples R China

[2] Tianjin Univ, Minist Educ, Key Lab Optoelect Informat Technol, Tianjin 300072, Peoples R China

[3] AVIC Chengdu CAIC Elect Co Ltd, Chengdu 610091, Sichuan, Peoples R China

来源：

IEEE PHOTONICS JOURNAL | 2019年 / 11卷 / 06期

基金：

中国国家自然科学基金; 中国博士后科学基金;

关键词：

Fiber optic sensor; Fabry-Perot sensor; acoustic; temperature; REFRACTIVE-INDEX; HIGH-SENSITIVITY; PRESSURE; SILICON; MEMS;

D O I：

10.1109/JPHOT.2019.2948045

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A compact fiber optic Fabry-Perot (F-P) sensor for simultaneous acoustic and temperature measurement has been proposed in the research. The sensor consists of silicon-glass-silicon sandwich structure by anodic bonding. The air F-P cavity with a circular hole and slots utilizes the deformation of the silicon membrane to realize acoustic measurement, and the silicon F-P cavity utilizes the temperature sensitivity of the refractive index of silicon to realize temperature measurement. The acoustic signal and temperature information could be recovered by acoustic and temperature demodulation method, respectively. The experimental results demonstrate that the sensor has a signal-to-noise ratio (SNR) of 53 dB and the acoustic sensitivity of 4.65 mV/Pa at 21 kHz, and the temperature sensitivity of 123.10 nm/degrees C at 20 degrees C similar to 120 degrees C. The proposed fiber optic F-P sensor has great potential for simultaneous acoustic and temperature measurement in aviation, due to its compact structure, mass production and immunity to electromagnetic interference.

引用

页数：10

共 27 条

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