Table Top Soft X-ray Laser Used for Fabrication of Periodic Nanostructures

被引：0
|
作者：
Li, W. [1 ,2 ]
Patel, D. [1 ,2 ]
Menoni, C. S. [1 ,2 ]
Chao, W. [3 ]
Marconi, M. C. [1 ,2 ]
机构：
[1] Colorado State Univ, NSF Engn Res Ctr Extreme Ultraviolet Sci & Techno, Ft Collins, CO 80523 USA
[2] Colorado State Univ, Dept Elect & Comp Engn, Ft Collins, CO 80523 USA
[3] Univ Calif Berkeley, Lawrence Berkeley Natl Lab, Ctr Xray Opt, Berkeley, CA 94720 USA
来源：
X-RAY LASERS 2014 | 2016年 / 169卷
关键词：
D O I：
10.1007/978-3-319-19521-6_39
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we report the fabrication of periodic structures utilizing a soft X-ray (SXR) table top laser and Talbot printing. Patterns are first recorded in photoresist, which are then used as sacrificial mask to transfer nanofeatures into noble metals. The laser source used in these experiments is a 46.9 nm table top capillary laser which enables a high spatial resolution to this lithography tool. The smallest critical dimension achieved was 40 nm.
引用
收藏
页码：301 / 306
页数：6
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