Tribological Characterization of TiN Coatings prepared by Magnetron Sputtering

被引：2
作者：
Makwana, Nishant S. [1 ]
Chauhan, Kamlesh V. [1 ]
Sonera, Akshay L. [1 ]
Chauhan, Dharmesh B. [1 ]
Dave, Divyeshkumar P. [2 ]
Rawal, Sushant K. [3 ]
机构：
[1] Charotar Univ Sci & Technol CHARUSAT, Chandubhai S Patel Inst Technol, CHAMOS Matrusanstha Dept Mech Engn, Changa 388421, India
[2] Sardar Patel Coll Engn, Dept Mech Engn, Sardar Patel Educ Campus,Vidhyanagar Vadtal Rd, Anand 318315, Gujarat, India
[3] McMaster Univ, McMaster Mfg Res Inst, Dept Mech Engn, 1280 Main St West, Hamilton, ON L8SL7, Canada
来源：
2ND INTERNATIONAL CONFERENCE ON CONDENSED MATTER AND APPLIED PHYSICS (ICC-2017) | 2018年 / 1953卷
关键词：
Titanium Nitride; RF Magnetron Sputtering; Tribology; TITANIUM NITRIDE; STEEL; FILM;
D O I：
10.1063/1.5032487
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Titanium nitride (TiN) coating deposited on aluminium and brass pin substrates using RF reactive magnetron sputtering. The structural properties and surface morphology were characterized by X-ray diffraction (XRD), atomic force microscope (AFM) and field emission scanning electron microscope (FE-SEM). There was formation of (101) Ti2N, (110) TiN2 and (102) TiN0.30 peaks at 3.5Pa, 2Pa and 1.25Pa sputtering pressure respectively. The tribological properties of coating were inspected using pin on disc tribometer equipment. It was observed that TiN coated aluminium and brass pins demonstrated improved wear resistance than uncoated aluminium and brass pins.
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页数：5
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