Femtosecond laser ablation of indium phosphide in air: dynamical, structural and morphological evolution

被引：0
|
作者：
Bonse, J. [1 ,4 ,5 ]
Bachelier, G. [2 ]
Wiggins, S. M. [3 ]
Siegel, J. [4 ]
Solis, J. [4 ]
Krueger, J. [1 ]
Sturm, H. [1 ]
机构：
[1] BAM Bundesanstalt Mat Forsch & Prufung, D-12205 Berlin, Germany
[2] Univ Lyon 1, CNRS, UMR 5579, Lab Spectrometrie Ion & Mol, F-69622 Villeurbanne, France
[3] Univ Strathclyde, Dept Phys, SUPA, Glasgow G4 0NG, Lanark, Scotland
[4] CSIC, Inst Opt, Laser Proc Grp, E-28006 Madrid, Spain
[5] Max Born Inst, D-12489 Berlin, Germany
来源：
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS | 2010年 / 12卷 / 03期
关键词：
Femtosecond laser ablation; Optical breakdown; Time-resolved measurements; Semiconductor; Indium phosphide; FORCE MICROSCOPIC INVESTIGATIONS; PHASE-TRANSITIONS; PULSE IRRADIATION; INP; SEMICONDUCTORS; DAMAGE;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The irradiation of single-crystalline iridium phosphide (c-InP) by Ti:sapphire femtosecond laser pulses (130 fs, 800 nm) in air is studied by means of in-situ time resolved reflectivity measurements [fs-time-resolved microscopy (100 fs-10 ns) and point probing analysis (ns - mu s)] and by complementary ex-situ surface analytical methods (Micro Raman Spectroscopy, Scanning Force, and Optical Microscopy). The dynamics of melting, ablation, and optical breakdown as well as structural changes resulting from rapid solidification are investigated in detail. Different laser-induced surface morphologies are characterized and discussed on the basis of recent ablation and optical breakdown models.
引用
收藏
页码：421 / 426
页数：6
相关论文
共 50 条
  • [1] Scanning force microscopic investigations of the femtosecond pulse laser ablation of indium phosphide in air
    Bonse, J
    Munz, M
    Sturm, H
    NANOTECHNOLOGY, 2003, 5118 : 221 - 234
  • [2] Ultrashort-pulse laser ablation of indium phosphide in air
    Bonse, J
    Wrobel, JM
    Krüger, J
    Kautek, W
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2001, 72 (01): : 89 - 94
  • [3] Ultrashort-pulse laser ablation of indium phosphide in air
    J. Bonse
    J.M. Wrobel
    J. Krüger
    W. Kautek
    Applied Physics A, 2001, 72 : 89 - 94
  • [4] Ultrashort-pulse laser ablation of indium phosphide in air
    Bonse, J.
    Wrobel, J.M.
    Kruger, J.
    Kautek, W.
    Applied Physics A: Materials Science and Processing, 2001, 72 (01): : 89 - 94
  • [5] Femtosecond laser micromachining of grooves in indium phosphide
    A. Borowiec
    H.K. Haugen
    Applied Physics A, 2004, 79 : 521 - 529
  • [6] Femtosecond laser micromachining of grooves in indium phosphide
    Borowiec, A
    Haugen, HK
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 79 (03): : 521 - 529
  • [7] Scanning force microscopic investigations of the femtosecond laser pulse irradiation of indium phosphide in air
    Bonse, J
    Munz, M
    Sturm, H
    IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2004, 3 (03) : 358 - 367
  • [8] Femtosecond laser irradiation of indium phosphide in air: Raman spectroscopic and atomic force microscopic investigations
    Bonse, J
    Wrobel, JM
    Brzezinka, KW
    Esser, N
    Kautek, W
    APPLIED SURFACE SCIENCE, 2002, 202 (3-4) : 272 - 282
  • [9] Dynamics of femtosecond laser-induced melting and amorphization of indium phosphide
    Bonse, J
    Wiggins, SM
    Solis, J
    JOURNAL OF APPLIED PHYSICS, 2004, 96 (04) : 2352 - 2358
  • [10] Ultrafast phase transitions after femtosecond laser irradiation of indium phosphide
    Bonse, J
    Wiggins, SM
    Solis, J
    JOURNAL OF APPLIED PHYSICS, 2004, 96 (05) : 2628 - 2631
12345