Pathway for the strain-driven two-dimensional to three-dimensional transition during growth of Ge on Si(001)

被引:177
作者
Vailionis, A
Cho, B
Glass, G
Desjardins, P
Cahill, DG
Greene, JE
机构
[1] Univ Illinois, Dept Mat Sci, Urbana, IL 61801 USA
[2] Univ Illinois, Mat Res Lab, Urbana, IL 61801 USA
关键词
D O I
10.1103/PhysRevLett.85.3672
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The two-dimensional (2D) to three-dimensional (3D) morphological transition in strained Ge layers grown on Si(001) is investigated using scanning tunneling microscopy. The initial step takes place via the formation of 2D islands which evolve into small (similar or equal to 180 Angstrom) 3D islands with a height to base diameter ratio of similar or equal to0.04, much smaller than the 0.1 aspect ratio of (105)-faceted pyramids which had previously been assumed to be the initial 3D islands. The "prepyramid" Ge islands have rounded bases with steps oriented along (110) and exist only over a narrow range of Ge coverages, 3.5-3.9 monolayers.
引用
收藏
页码:3672 / 3675
页数:4
相关论文
共 25 条
[1]   Strain-driven alloying in Ge/Si(100) coherent islands [J].
Chaparro, SA ;
Drucker, J ;
Zhang, Y ;
Chandrasekhar, D ;
McCartney, MR ;
Smith, DJ .
PHYSICAL REVIEW LETTERS, 1999, 83 (06) :1199-1202
[2]   Critical nuclei shapes in the stress-driven 2D-to-3D transition [J].
Chen, KM ;
Jesson, DE ;
Pennycook, SJ ;
Thundat, T ;
Warmack, RJ .
PHYSICAL REVIEW B, 1997, 56 (04) :R1700-R1703
[3]   Dislocation-free island formation in heteroepitaxial growth: A study at equilibrium [J].
Daruka, I ;
Barabasi, AL .
PHYSICAL REVIEW LETTERS, 1997, 79 (19) :3708-3711
[4]   Mean-field theory of quantum dot formation [J].
Dobbs, HT ;
Vvedensky, DD ;
Zangwill, A ;
Johansson, J ;
Carlsson, N ;
Seifert, W .
PHYSICAL REVIEW LETTERS, 1997, 79 (05) :897-900
[5]   DISLOCATION-FREE STRANSKI-KRASTANOW GROWTH OF GE ON SI(100) [J].
EAGLESHAM, DJ ;
CERULLO, M .
PHYSICAL REVIEW LETTERS, 1990, 64 (16) :1943-1946
[6]   Evolution of coherent islands in Si1-xGex/Si(001) [J].
Floro, JA ;
Chason, E ;
Freund, LB ;
Twesten, RD ;
Hwang, RQ ;
Lucadamo, GA .
PHYSICAL REVIEW B, 1999, 59 (03) :1990-1998
[7]  
FREUND LB, COMMUNICATION
[8]   Macroscopic and nanoscale faceting of germanium surfaces [J].
Gai, Z ;
Yang, WS ;
Zhao, RG ;
Sakurai, T .
PHYSICAL REVIEW B, 1999, 59 (23) :15230-15239
[9]   STRESS-CONCENTRATION AT SLIGHTLY UNDULATING SURFACES [J].
GAO, HJ .
JOURNAL OF THE MECHANICS AND PHYSICS OF SOLIDS, 1991, 39 (04) :443-458
[10]   Gas-source growth of group IV semiconductors: III. Nucleation and growth of Ge/Si(001) [J].
Goldfarb, I ;
Owen, JHG ;
Hayden, PT ;
Bowler, DR ;
Miki, K ;
Briggs, GAD .
SURFACE SCIENCE, 1997, 394 (1-3) :105-118