Design and development of a precision machine tool using counter motion mechanisms

被引:23
作者
Wang, Z. G. [1 ]
Cheng, X. [1 ]
Nakamoto, K. [1 ]
Kobayashi, S. [2 ]
Yamazaki, K. [1 ]
机构
[1] Univ Calif Davis, Dept Mech & Aeronaut Engn, Davis, CA 95616 USA
[2] Sodick Co Ltd, Tsuzuki Ku, Yokohama, Kanagawa 2248522+, Japan
关键词
Ultra-precision machine tool; Vibration suppression; Machining dynamics; Design; Ductile mode micromachining; LINEAR MOTOR;
D O I
10.1016/j.ijmachtools.2009.10.014
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
in order to meet the increasing demand for high-quality miniature parts made of a wide variety of materials, the electronics, biomedical and optical industries are moving towards micro/nano-machining. Currently, mechanical micromachining can only be performed under very low feed rates and small depth of cut, which makes it very difficult to reacts reasonable productivity. To cope with the low-productivity problem for micro/nano-machining of high-precision molds or miniature parts, a highly accurate and productive machining center has been designed and developed in this paper. The developed machine tool is equipped with counter balance axes, and each axis is driven at its center of gravity to achieve high acceleration/deceleration without causing any vibration. This paper describes the theoretical and practical background of the design of the machine tool and its control and measurement system. Then, experiments are carried out to evaluate the machining performance of this designed machine tool. (C) 2009 Elsevier Ltd. All rights reserved.
引用
收藏
页码:357 / 365
页数:9
相关论文
共 9 条
  • [1] Analysis and improvement of motion accuracy of hydrostatic feed table
    Shamoto, E
    Park, CH
    Moriwaki, T
    [J]. CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2001, 50 (01) : 285 - 290
  • [2] High speed nanometer positioning using a hybrid linear motor
    Shinno, H
    Hashizume, H
    [J]. CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2001, 50 (01) : 243 - 246
  • [3] Slocum A.H., 1992, PRECISION MACHINE DE
  • [4] *SOD CO LTD, CER
  • [5] Development of 5-axis linear motor driven super-precision machine
    Sriyotha, P.
    Nakamoto, K.
    Sugai, M.
    Yamazaki, K.
    [J]. CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2006, 55 (01) : 381 - 384
  • [6] *SUMIDIA DA, BLANKS
  • [7] TAKEUCHI Y, 2000, ANN CIRP, V49, P295
  • [8] WEEK M, 2001, P SOC PHOTO-OPT INS, V4440, P145
  • [9] Wickert J.A., 1988, SHOCK VIBRATION DIGE, V20, P3