NO2 gas sensing studies:: Impact of geometrical and physical characteristics of ohmic contacts on n-InP epitaxial sensitive layer

被引：2
|
作者：
Berry, L. [1 ]
Brunet, J. [1 ]
Varenne, C. [1 ]
Mazet, L. [1 ]
Pauly, A. [1 ]
Wierzbowska, K. [1 ]
机构：
[1] Univ Clermont Ferrand, CNRS, UMR 6602, LASMEA, F-63177 Aubiere, France
来源：
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS | 2007年 / 27卷 / 04期
关键词：
gas sensor; InP; ohmic contacts; nitrogen dioxide;
D O I：
10.1016/j.msec.2006.06.010
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
This paper deals with the influence of technological process steps on electrical and metrological parameters of NO2 gas sensors. The NO2 gas sensors are based on thin n-InP epitaxial layers. The NO2 gas action makes the resistance of the device, measured in parallel to the surface between ohmic contacts, increase. It is demonstrated that the methodology of fabrication modifies the geometrical and the physical parameters of ohmic contacts and the reproducibility of the devices. The impact on the gas sensors in response to NO2 is also discussed. (C) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：654 / 658
页数：5
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