A Capacitance Detection Circuit for On-chip Microparticle Manipulation

被引：0

作者：

Yamane, Rie ^{[1
]}

Iwasaki, Hirosuke ^{[1
]}

Dei, Yoshiaki ^{[1
]}

Cui, Ji ^{[1
]}

Matsuoka, Toshimasa ^{[1
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Osaka, Japan

来源：

2014 IEEE INTERNATIONAL MEETING FOR FUTURE OF ELECTRON DEVICES, KANSAI (IMFEDK) | 2014年

关键词：

component; dielectrophoresis; microparticle; manipulation; CBCM; capacitance detection circuit; DIELECTROPHORESIS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This study proposes a capacitance detection circuit for on-chip microparticle manipulation. The designed circuit employs the charge-based capacitance measurement technique to convert a capacitance value to a digital output code. Experimental results reveal capacitance measurement within error of 4 fF.

引用

页数：2

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