共 10 条
[1]
[Anonymous], 1982, PLASMA SCI TECHNOLOG
[4]
MOREAU S, 1999, P 12 INT COLL PLASM
[5]
Mozetic M, 1998, INFORM MIDEM, V28, P175
[6]
Ricard A., 1996, REACTIVE PLASMAS
[7]
SIMPSON LA, 1979, AUST OCCA P NEWS, V16, P1
[8]
Sorli I, 1996, INFORM MIDEM, V26, P35
[9]
Determination of atomic oxygen density with a nickel catalytic probe
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
2000, 18 (02)
:338-342
[10]
Wertheimer M. R., 1998, HDB THIN FILM PROCES