3-5 μm mid-infrared broadband absorbers composed of layered ITO nanorod arrays with high visible light transmittance

A mid-infrared broadband absorber with high visible light transmittance is proposed in this paper. The absorber is composed of layered ITO nanorod arrays with increasing angles fabricated by oblique angle deposition technique. The experimental results show that the average transmittance of the absorber reaches 80% in the 400-800 nm band and the integrated absorption reaches 82.9% in the 3-5 mu m band, when the QCM thickness of the first layer of film is 100 nm and the deposition angle theta is 10 degrees, the QCM heights of the second to fifth layers of nanorods are all 330 nm, and their deposition angles are 55 degrees, 68 degrees, 80 degrees, and 87 degrees, respectively. The high transmittance in the visible band is attributed to the gradient of the refractive index. The broadband absorption in the mid-infrared band results from different resonances in the empty cavities with different sizes. Such a simple and large-area absorber has potential applications in window materials and infrared cloaking. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement