On the photoluminescence of a-C:H films

被引：0
|
作者：
Tomozeiu, N
Seekamp, J
Ferrari, A
Niemann, J
机构：
[1] Univ Bucharest, Fac Phys, Bucharest 5600, Magurele, Romania
[2] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
来源：
JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS | 2000年 / 2卷 / 03期
关键词：
photoluminescence; amorphous carbon film;
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
a-C:H films deposited from methane and helium mixture in a capacitively coupled rf plasma were found to show photoluminescence (PL) with peak intensities at energies far above the Tauc gap of these films. Apart from the PL the films were investigated with respect to their LR and UV/VIS absorption properties as well as their Raman spectra were examined. The ultraviolet (UV) and blue luminescence from hard a-C:H thin films are explained by incorporation of polycyclic hydrocarbons from gas-phase reactions in the methane helium plasma into the film.
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收藏
页码：241 / 246
页数：6
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