Design and Performance of a Focus-Detection System for Use in Laser Micromachining

被引：23

作者：

Cao, Binh Xuan ^{[1
,2
]}

Bae, Munju ^{[1
]}

Sohn, Hyonkee ^{[1
]}

Choi, Jiyeon ^{[1
,2
]}

Kim, Youngduk ^{[3
]}

Kim, Jeng-o ^{[1
]}

Noh, Jiwhan ^{[1
,2
]}

机构：

[1] Korea Inst Machinery & Mat, Dept Laser & Electron Beam Applicat, Daejeon 34103, South Korea

[2] Korea Univ Sci & Technol UST, Dept Nanomechatron, Daejeon 34113, South Korea

[3] Korea Adv Inst Sci & Technol, Dept Mech Engn, Daejeon 34141, South Korea

来源：

MICROMACHINES | 2016年 / 7卷 / 01期

关键词：

detection of focal position; focal position; laser micromachining; AUTOFOCUS; BEAMS;

D O I：

10.3390/mi7010002

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the specimen can easily be positioned at the focal position, and the dynamically adjustable scan amplitude and the CCD camera can be used to monitor the laser beam's profile. The proposed technique will be particularly useful for locating the focal position on any surface in laser micromachining.

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